EBARA's Products

The Component Division of EBARA Technologies Inc. supplies advanced vacuum and abatement systems as well as other equipment focused on the needs of the semiconductor, photovoltaic and R&D sectors. Our industry-leading exhaust management solutions consist of dry vacuum pumps, turbomolecular pumps, point-of-use abatement, exhaust line heaters, vacuum hardware and related services.

Our Systems Division supplies advanced technologies for front-end and back-end semiconductor manufacturing. EBARA is a leading supplier of 200 mm and 300mm Chemical Mechanical Polishing systems (CMP), advanced Wafer Plating Systems, Bevel and Backside Clean Treatment Systems.

Explore the categories below to see our products and application specifications below. For any questions, please contact us and we will be happy to assist you.

All-in-one Systems

All-in-one Systems

EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA's best know-how. The system is designed in accordance with customer's facility needs for customized integrated solutions.

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Chemical Mechanical Polishing Systems

Chemical Mechanical Polishing Systems

Our Applications Engineering groups in Japan and the U.S. continue to push the envelope on the technologies required for tomorrow's devices. Whether this entails working on copper, low k dielectric planarization, or 300mm, EBARA has a chemical mechanical polishing system that meets your need.

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Ozone

Ozone

EBARA’s ozone-related equipment includes the Ultra High Concentration Clean Ozonizer (Ozone Gas Generator, OZC) which produces high concentrations of virtually impurity free ozone gas by using a unique trench discharge cell system developed by EBARA.

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Dry Pumps

Dry Pumps

EBARA is a world-leader in the design and manufacture of "dry" vacuum pumps. EBARA dry vacuum pumps provide a host of product advantages.

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Foreline Traps

Foreline Traps

We offer a variety of standard and custom foreline traps designed for trapping toxic gasses and particulate created when manufacturing semiconductors and photovoltaic cells. To determine which type of foreline trap is right for your application, please view additional information, or call Ebara at 800-535-5376.

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Gauges

Gauges

EBARA Technologies, Inc.'s vacuum pump gauges can be used in a wide variety of applications including Loadlocks, PVD Systems, Analytical Systems and a wide variety of others. Learn more about the product specs below.

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Point-of-Use Abatement

Point-of-Use Abatement

EBARA Technologies Inc. offers a full line of comprehensive Point-of-Use Abatement (POU) systems for the exhaust treatment of effluent gases used in the manufacturing of semiconductor chips, photovoltaic cells and flat panel displays.

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Thermal Solutions

Thermal Solutions

Vacuum pump and gas lines have unique thermal challenges, including the poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.

Gasline Thermal Management

In order to prevent condensation from building up in the line we offer wrap-around heaters in a variety of sizes, providing a “turn-key” solution for gasline thermal management.

Foreline / Exhaust Line Thermal Management

For the pump’s forelines and exhaust lines, we offer wrap-around thermal management for elbows, tee-connectors, bellows, flanges and valves.

Thermal Controllers

Our gasline and pipline heater controls are accurate up to ±1 degree, a powerful thermal controller that can be customized to your needs for greater flexibility and control.

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Turbomolecular Pumps

Turbomolecular Pumps

All of EBARA’s turbomolecular pumps are compound turbo pumps, adding a second molecular drag stage to the same shaft. Adding this stage increases the compression ratio of the pump and also greatly increases the highest allowable foreline pressure of the pump.

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Vacuum Hardware

Vacuum Hardware

We offer a complete line of stainless steel vacuum hardware designed to complement our dry pumps, turbo pumps and abatement systems. We have thousands of vacuum pump parts and other components in stock every day.

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Vacuum Valves

Vacuum Valves

We offer a variety of vacuum valves for use in a range of applications and conditions including poppet valves, ball valves, linear gate valves and bakeable, all-metal valves.

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Wafer Plating Systems

Wafer Plating Systems

EBARA’s wafer plating equipment is perfect for creating RF amplifiers, LEDs, CPU components, and more.

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