Vacuum pump and gas lines have unique thermal challenges, including the poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.
Gasline Thermal Management
In order to prevent condensation from building up in the line we offer wrap-around heaters in a variety of sizes, providing a “turn-key” solution for gasline thermal management.
Foreline / Exhaust Line Thermal Management
For the pump’s forelines and exhaust lines, we offer wrap-around thermal management for elbows, tee-connectors, bellows, flanges and valves.
Our gasline and pipline heater controls are accurate up to ±1 degree, a powerful thermal controller that can be customized to your needs for greater flexibility and control.