Combustion Wash

Point-of-Use Abatement Burner Washers

EBARA Technologies Inc. offers a line of combustion-wash (or burner washer) Point-of-Use (POU) Abatement systems. EBARA's burner-washers are based on the principle of gas decomposition by combustion. This technology offers the greatest flexibility for exhaust gas abatement for the effluent gases used in both semiconductor and photovoltaic manufacturing.

EBARA's patented burner technology produces high temperatures that allow high abatement efficiencies for the process gases includingperfluorinated gases, PFCs. Learn about the specifications of our models below, or contact us for more information.

Features & Benefits

  • High efficient burner washer (e.g. >99% for PFCs) for low and high waste gas flows.
  • Highest standards of safety to eliminate any risks for operators and environment.
  • Lowest Cost of Ownership through low utility costs and by long maintenance intervals.
  • No risk of corrosion - all pipes are coated inside with corrosion resistant material. No neutralization agent is necessary.
  • The system operates with city water, no water pre-conditioning is required.
  • Automatic scrapers for mechanical cleaning of reactor and burner prevent blockages allow cleaning without opening the system and reduce the preventive maintenance impact.
  • Flexible burning gases are possible.
  • Best possible reduction of nitrogen oxides (NOx) by small amounts of purge gas necessary. That is especially true in combination with EBARA dry vacuum pumps with their small amounts of N2 purge required.
  • Various operation modes: high, medium,low and idle operation mode allow to save utilities cost.

Specifications

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Model G5

 
Maximum flow rate 350 slm
Inlet port max. 4 ports NW 40
Dimensions 47.3 (w) x 25.5 (d) x 74.8 (h) in.
Weight 1200 lb.
Voltage ranges 208/400 VAC, 50/60 Hz
Maximum power 1.7 kVA
Fuel type Natural gas or propane
Fuel* Natural gas: 14 [26] slm
Propane: 6 [11] slm
Oxygen* 20 [58] slm
Dry air* 100 [140] slm
Nitrogen 13 slm (during operation)
City water 10 l/min (drain water), 3 l/m in water save model
Cooling water 3 l/min
* Values in brackets, [] show consumption when abating CF4
 

Model G6

Fuel LNG LPG
Basic model name G6-A1 G6-A2 G6-A3 G6-A4 G6-P1 G6-P2 G6-P3 G6-P4
Number of gas inlet port 1 2 3 4 1 2 3 4
Abatement type High performance burning + high efficiency wet scrubber
Standard equipment Burner scraper (for powder removal)
Max inflow gas volume, L/min 1,200
Dimension (L x W x H mm) in (1,200 x 650 x 1,900) 47.2 x 25.6 x 74.8
Memo H2 abatement: max. 300 L/min,
NF3 abatement: max. 150 L/min
 

Model G6-E

Fuel LNG LPG
Basic model name G6-E-A1 G6-E-A2 G6-E-A3 G6-E-A4 G6-E-P1 G6-E-P2 G6-E-P3 G6-E-P4
Number of gas inlet port 1 2 3 4 1 2 3 4
Abatement type High performance burning + high efficiency wet scrubber
Max inflow gas volume, L/min 400
Dimension (L x W x H mm) in (1,200 x 650 x 1,900) 47.2 x 25.6 x 74.8
 
 
 

Model G6-PV

Fuel LNG LPG
Basic model name G6-PV-A1 G6-PV-A2 G6-PV-A3 G6-PV-A4 G6-PV-P1 G6-PV-P2 G6-PV-P3 G6-PV-P4
Number of gas inlet port 1 2 3 4 1 2 3 4
Abatement type High performance burning + high efficiency wet scrubber
Max inflow gas volume, L/min 1,200
Dimension (L x W x H mm) in (1,200 x 2,000 x 2,300) 47.2 x 78.7 x 90.6