Catalyst / Absorption

Point-of-Use Abatement Dry Bed Adsorption

EBARA's FDS Systems (Fluorine Dry Scrubber) are capable of abating most PFC gases > 99.9%. The technology utilizes a heated proprietary catalyst that both destructs and captures the fluorine compound for ultimate PFC gas treatment. The FDS Systems do not require any special fuels or water to abate the PFCs resulting in low facility requirements and zero waste water generated. Which is perfect for facilities that have to reduce their PFC gas but lack the infrastructure to support combustion-wash and catalytic-wash technologies.

EBARA offers three models, FDS100, FDS100D and FDS250. The FDS100 is sized for 100 liter per minute inlet gas flow and FDS250 is sized for 250 liter per minute inlet gas flows. The FDS100D and FDS250 have two reactor canisters with serial flow allowing for 100% uptime for abating the gases. FDS Systems can abate PFCs over 99.9% without producing other harmful by-products like NOx, SOx and hazardous solid wastes. The exhausted reagents are not hazardous and can be recycled and used as raw materials for other industrial processes resulting in zero total waste.

Features & Benefits

  • Zero water consumption
  • High decomposition & removal performance
  • High gas flow & high treatment capacity
  • Zero down time
  • Reduction of Byproduct Gas
  • PFC Gas Abatement

 

Applications

  • PFC Abatement
  • CF4
  • C2F6
  • C3F8
  • SF6
  • Other Per fluorinated Gases (PFC)

Specifications

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Model FDS100S

Cabinet Max inlet flow (L/min) 100 L/min
Diameter (mm) WxDxH 600x600x2000
Weight (kg) Cabinet

200kg

Canister 260 kg x 1
Total 460 kg
Number of canister 1
Canister Diameter (mm) WxDxH 400x510x1515
Weight (kg) Canister (1 unit) 260 kg
Reactor Volume 75 L
Life (per 1 canister) 4,500 L
Feature Compact
Easy installation for existing facility

Model FDS100D

Cabinet Max inlet flow (L/min) 100 L/min
Diameter (mm) WxDxH 600x600x2000
Weight (kg) Cabinet

200kg

Canister 260 kg x 1
Total 460 kg
Number of canister 1
Canister Diameter (mm) WxDxH 400x510x1515
Weight (kg) Canister (1 unit) 260 kg
Reactor Volume 75 L
Life (per 1 canister) 4,500 L
Feature Compact
Easy installation for existing facility

Model FDS250

Cabinet  Max inlet flow (L/min) 250 L/min
Diameter (mm) WxDxH 1520x1000x2150
Weight (kg) Cabinet

200kg

Canister 315 kg
Total 1030 kg
Number of canister 2
Canister Diameter (mm) WxDxH 545x700x1940
Weight (kg) Canister (1 unit) 315 kg
Reactor Volume 95 L
Life (per 1 canister) 10,000 L
Feature No down time
High amount of inlet flow