Point-of-Use Abatement Oxidation (Wash)
Dynamic Oxidation is the most cost effective solution for pyrophoric gas abatement. Ebara Technologies, Inc. partners with Pure Air Systems to bring this groundbreaking oxidation technology to you. Large flows of pyrophoric gases like SiH4 are used extensively in Semiconductor and Thin Film Solar manufacturing processes. Dynamic oxidation provides one of the most reliable abatement methods at the lowest capital and operation cost. Managing the particles can be at integrated point-of-use in the system or scaled up to a facility system. The dynamic oxidation units can be fitted with a mechanical filter (S.DOC), no filters (S.DOC Cyclone) or water scrubber (E.DOC-SC) to handle any water soluble gases.