Oxidation (Wash)

Point-of-Use Abatement Oxidation (Wash)

Dynamic Oxidation is the most cost effective solution for pyrophoric gas abatement. Large flows of pyrophoric gases like SiH4 are used extensively in Semiconductor and Thin Film Solar manufacturing processes. Dynamic oxidation provides one of the most reliable abatement methods at the lowest capital and operation cost. Managing the particles can be at integrated point-of-use in the system or scaled up to a facility system. The dynamic oxidation units can be fitted with a mechanical filter (DOU) or water scrubber (DOU-SC) to handle any water soluble gases.

Features & Benefits

DOU

  • Four Process Inlets
  • Stainless Steel Construction
  • Connectivity to Process Tool
  • Airflow Interlock
  • Semi S2 Certified
  • CE Marked
  • UL Listed

DOU-SC

  • Dynamic oxidation is a highly effective method to abate pyrophoric effluent gases.
  • A place where reactions are forced to occur.
  • Achieves high conversion efficiencies without active burning or added heat, by forced turbulent mixing of the pyrophorics with large quantities of air.
  • Each pyrophoric gas molecule undergoes numerous collisions with oxygen molecules increasing the probability of reaction to 100% and eliminating the hazards from the effluent stream.

Applications

DOU 

  • Silane
  • TEOS
  • Tungsten
  • Silane
  • Dichlorosilane
  • Ammonia
  • Phosphine

DOU-SC

  • Chlorine
  • Boron Trichloride
  • Hydrogen Bromide
  • Ammonia
  • TEOS
  • Dichlorosilane

Specifications

Choose product to view specifications

Model DOU-SC

Hazardous Gas Flow

35 slm*

Pyrophoric and toxic

Total Gas Flow

725 slm*

-

Number of Process Inlet

4

KF40, 1.5"

Process Exhaust

50 cfm*

ISO 100, 4"

Cabinet Exhaust

50 to 80 cfm*

KF 50, 2"

Electrical Requirements

120/240 VAC, 50-60 Hz, 1 Phase

-

Water Requirements

City Water, DI Water
Ca, Mg (hardness) < 10mg/L, pH 6.5-8.0
CL < 80MG/l, Fe < 0.3mg/L, Mn < 0.2mg/L,
F< 0.8mg/L, Surfactant < 0.02mg/L

1/2" NPT Connection
1 - 16 SLM

N2 Requriements

> 80 Psi

1/4" Push Connection

Tool Interface

Interface signal for customer's monitoring system

Relay dry contacts

Dimensions (in)

26 X 29 X 65*

-

Shipping Weight

approx. 280 lbs*

-

Model DOU

Specification

DOU

Process

# Process Inlet

4

Process flow, SLM

2 (pyrophoric)
100 (total gas flow)

Exhaust flow, SLM (CFM)

800-1600 (0.8-1.6)

Exhaust suction, in wc

1.5

Compressed air

Supply pressure

3.5 to 5 bar / 50 to 70 psig

Connection

1/8 FNPT

Gas connection

Gas inlet

NW40

Gas outlet

ISO100

Power supply

Voltage

100 to 240 VAC, 50/60 Hz, 1 ph

Amperage

2A

Power consumption

60W

Connection

Screw clamp terminals on disconnect through Conduit or Cord Grip

Dimensions

Width, mm (in)

559 (22)

Depth, mm (in)

559 (22)

Height, mm (in)

1488 (59)

Weight, kg (lbs)

109 (240)

Communication

Screw Terminals, Dry Contacts, 24V Valve Operate, Signals