Wet Scrubbing

Wet Scrubbers

For those who need to trap and neutralize harmful water soluble gases, we source Airgard wet scrubbers to go with our with point-of-use abatement systems. Airgard’s wet scrubbers offer unrivaled efficiency, removing more than 99.99% of water-soluble gasses, and the latest in wet scrubbing technology.

We offer two models to choose from:

Airgard Model V

The Model V offers highly efficient gas scrubbing for removal of HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3, SiH2Cl2, SiCl4) and Flourosilanes (SiF4) and other water soluble gases, while consuming up to 50% less water when compared with other wet scrubbers.

Airgard Model C

Airgard’s deluxe wet scrubber, the Model C has a PLC-based control box that can be remotely programmed from a PC. Like the Model V, the Model C offers unrivaled efficiency and water savings while removing more than 99.99% of water soluble gases.

Features & Benefits

  • Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
  • Automated gas inlet plunger removes restrictions without process interruption.
  • Highly efficient removal of water soluble gases such as HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3, SiH2Cl2, SiCl4) and Flourosilanes (SiF4).
  • Reduces most harmful gas emissions to less than 1 part per million in high gas flow rates of up to 5000 SLM.
  • Lowest fresh water consumption in the industry - up to 50% less.
  • Small footprint.
  • No foaming and no sediment.
  • Programmable logic scrubber control box automates gas inlet plunger to reactor functions and reports scrubber status.

Applications

  • EPI (High Flow/Solar applications)
  • PV Processes
  • Dedicated NH3 treatment for house separation
  • Purification Processes
  • Gas Cabinet Vent
  • Chemical Manufacturing
  • All water soluble process gasses

Specifications

Choose product to view specifications

Model V

Gas Inlet Devices
Patent gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
Second Scrubbing Chamber
Five fine spray, high velocity nozzles ensures effective removal of impurities
First Scrubbing Chamber
Coarse spray, high flow nozzle coats chamber and removes bulk impurities
Pump
Corrosion resistant high output and long life recirculates 35 GPM
Small Foot Print
24" x 24"
Sump Geometry
Unique pump input, drain and fresh water input locations prevent foaming, sediment and minimize water use
Fresh Water Input
Strategic position increases efficiency, minimizes water use and eliminates foam
Packed Column
The final polish. Packing Requires no maintenance or replacement
Eductor Cone
Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2\" of water)

Model C

Gas Inlet Devices
Patent gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
Second Scrubbing Chamber
Five fine spray, high velocity nozzles ensures effective removal of impurities
First Scrubbing Chamber
Coarse spray, high flow nozzle coats chamber and removes bulk impurities
Pump
Corrosion resistant high output and long life recirculates 35 GPM
Small Foot Print
24 ½" x 32 ½"
Sump Geometry
Unique pump input, drain and fresh water input locations prevent foaming, sediment and minimize water use
Fresh Water Input
Strategic position increases efficiency, minimizes water use and eliminates foam
Packed Column
The final polish. Packing Requires no maintenance or replacement
Eductor Cone
Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2\" of water)