Dry Pumps

Dry Vacuum Pumps

EBARA is a world-leader in the design and manufacture of "dry" vacuum pumps. EBARA dry vacuum pumps provide a host of product advantages including:

  • increased reliability
  • reduced clean room particulate load
  • low noise
  • low vibration
  • lower operating costs
  • lowest cost-of-ownership when compared with other dry vacuum pumps on the market today.

Diversified product lines make EBARA the industry leader in vacuum abatement technology and service. EBARA's dry vacuum pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. EBARA's dry pumps are also perfect for many applications in the semiconductor industry, and any application where oil backstreaming is unacceptable. Learn about our models below, or contact us for more information.

Already know what you're looking for? Choose below:

Model EV-A

Model EV-A

The Model EV-A series air-cooled dry vacuum pumps have industry-leading specifications. The non-contact, multi-staged roots are designed for reliable, particle-free vacuum generation. Typical applications for EV-A dry pumps include load locks, analytical instruments and metrology equipment that require the best vacuum performance and optimum uptime.

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Model EV-M

Model EV-M

The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 2,000 Lit/min up to 80,000 Lit/min pumping speed. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.

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Model EV-S

Model EV-S

The EV-S Series pumps are energy efficient vacuum pumps for clean to light duty processes.The pumping speeds range from 58 to 710 CFM with an ultimate pressure as low as 3 mTorr.

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Model EST

Model EST

The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

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Model ESA

Model ESA

The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

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Model ESR

Model ESR

The ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr.

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Model PDV

Model PDV

The PDV Series Dry Vacuum Pumps offers a low cost, oil free energy efficient solution for replacing scroll and oil pumps for clean applications. The PDV Series Dry Vacuum Pumps require no annual maintenance and offers a low cost of ownership and higher return on investment (ROI). The serial communication allows both remote monitoring and control to the PDV Series Dry Vacuum Pumps.

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