Model ESA

Model ESA Dry Vacuum Pumps

The ESA Series consists of a two-stage main pump design engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

Features & Benefits

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motor on the booster pump
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

Applications

  • (For Model ESA25-100) Ideal for light gas pumping MOCVD processing
  • (For Model ESA200-500) Ideal for large-volume atmospheric, load lock processes

Specifications

Choose product to view specifications

Model ESA25S

Pumping Speed 50/60 Hz CFM 88/106
L/min 2500/3000
m3/Hr 150 / 180
Ultimate Pressure 50/60 Hz mTorr  38 / 30
Pa 5.3 / 4.0
mBar 0.053 / 0.04
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW  
Maximum Power KW  
Cooling Water Requirements Min. Flow Rate 
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
11
Cabinet Dimensions
LxWxH
inches 35.4 x 15.5 x 19.7
mm 900 x 394 x 500
Weight lbs 528
kg 240

Model ESA70W

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
274/296
7000/8400
420/504
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
3/2
0.4/0.27
0.004/0.0027
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW  
Maximum Power KW  
Cooling Water Requirements Min. Flow Rate 
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
15
Cabinet Dimensions
LxWxH
inches
mm
39.3 x 15.7 x 31.5
997 x 400 x 800
Weight lbs
kg
836
380

Model ESA100W

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
353
10000
600
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
0.000002
0.27
0.0027
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW 3.4
Maximum Power KW 5.2
Cooling Water Requirements Min. Flow Rate 
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
12
Cabinet Dimensions
LxWxH
inches
mm
41 x 15.7 x 31.9
1041 x 400 x 810
Weight lbs
kg
882
400

Model ESA200W

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
706
20000
1200
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
0.00004
0.53
0.0053
Connection Gas Inlet ISO 100
Gas Outlet NW 40
Power at Ultimate Pressure KW 3.4
Maximum Power KW 7.5
Cooling Water Requirements Min. Flow Rate 
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
10
Cabinet Dimensions
LxWxH
inches
mm
36.2 x 16.0 x 30.0
920 x 400 x 760
Weight lbs
kg
904
410

Model ESA300W

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
1,060
30,000
1,800
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
4
0.53
0.0053
Connection Gas Inlet ISO 100
Gas Outlet NW 40
Power at Ultimate Pressure KW 7.3
Maximum Power KW 12.5
Cooling Water Requirements Min. Flow Rate 
L/min
6

Bearing and Dilution N2

Bearing Seals
L/min
5
Cabinet Dimensions
LxWxH
inches
mm
43.7 x 24.4 x 35.6
1110 x 620 x 905
Weight lbs
kg
1543
700

Model ESA500W

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
1766
50000
3000
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
7.5*10-6
1
0.01
Connection Gas Inlet ISO 100
Gas Outlet NW 50
Power at Ultimate Pressure KW 6.7
Maximum Power KW 24.1
Cooling Water Requirements Min. Flow Rate 
L/min
6

Bearing and Dilution N2

Bearing Seals
L/min
6
Cabinet Dimensions
LxWxH
inches
mm
60.5 x 24.4 x 41.1
1537 x 620 x 1045
Weight lbs
kg
1650
750