Model ESR

Model ESR Dry Vacuum Pumps

The ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr.

The ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and motor controls. These enhancements drasticly reduces utility consumption (electrical power, cooling water, nitrogen, footprint) compared to AC motored pumps. Intelligent controls allow the ESR to be throttled down and be placed in an idle mode when not used for processing.

For clean applications, no nitrogen purge is required. A minimal amount of nitrogen purging along with the pump constructed out of NiResist (homogeneous steel alloy with high nickel content) makes the ESR ideal for pumping corrosive gases.

Features & Benefits

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • No Nitrogen purge required for ESR20N in clean applications
  • Variable pumping speed to match application requirements
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

Applications

  • Sputtering
  • PVD
  • Load Lock and Transfer
  • Clean Gases and Processes

Specifications

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Model ESR20N

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
46 - 71 
1300 - 2000 
78 - 120
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
5
0.67
0.0067
Connection Gas Inlet NW 40
Gas Outlet NW 40
Power at Ultimate Pressure KW 0.55 - 0.70
Maximum Power KW 2.5
Cooling Water Requirements Min. Flow Rate 
L/min
2

Bearing and Dilution N2

Bearing Seals
L/min
0 to 12
Cabinet Dimensions
LxWxH
inches
mm
25 x 11 x 12.6 
635 x 280 x 320
Weight lbs
kg
200 
90

Model ESR30N

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
105
3000
180
Ultimate Pressure 60 Hz mTorr 
Pa
mBar 
5.03*10-6
0.67
0.0067
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW 1.7
Maximum Power KW 3.5
Cooling Water Requirements Min. Flow Rate 
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
12
Cabinet Dimensions
LxWxH
inches
mm
29.9 x 15.7 x 18.0 
760 x 400 x 458
Weight lbs
kg
418 
190

Model ESR80WN

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
141 - 300
4,000 - 8,500
240 - 510
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
1.5
0.2
0.002
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW 0.8 - 1.9
Maximum Power KW 4.5
Cooling Water Requirements Min. Flow Rate 
L/min
2

Bearing and Dilution N2

Bearing Seals
L/min
2 to 12
Cabinet Dimensions
LxWxH
inches
mm
26 x 15 x 25.8 
660 x 380 x 655
Weight lbs
kg
400
180

Model ESR200WN

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
353 - 706
10,000 - 20,000
600 - 1,200
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
1
0.13
0.0013
Connection Gas Inlet ISO100
Gas Outlet NW 40
Power at Ultimate Pressure KW 0.8 - 1.1
Maximum Power KW 5
Cooling Water Requirements Min. Flow Rate 
L/min
2

Bearing and Dilution N2

Bearing Seals
L/min
2 to 12
Cabinet Dimensions
LxWxH
inches
mm
31.1 x 15 x 25.8 
790 x 380 x 644
Weight lbs
kg
520
250

Model ESR300WN

Pumping Speed 50/60 Hz CFM
L/min
M3/Hr
1059 
30,000
1,800
Ultimate Pressure 50/60 Hz mTorr 
Pa
mBar 
1.5
0.2
0.002
Connection Gas Inlet NW 100
Gas Outlet NW 40
Power at Ultimate Pressure KW 2.9
Maximum Power KW 7.5
Cooling Water Requirements Min. Flow Rate 
L/min
3.5

Bearing and Dilution N2

Bearing Seals
L/min
2 to 12
Cabinet Dimensions
LxWxH
inches
mm
33 x 19 x 35
(825 x 460 x 880)
Weight lbs
kg
860
390