Model EST

Model EST Dry Vacuum Pumps

The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed.

The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

Features & Benefits

  • Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
  • Variable pumping speed to match application requirements
  • High performance brushless DC motors
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings
  • SEMI S2 assessed, NRTL Listed, CE Marked

Applications

  • CVD Process
  • Etching Process
  • High Pumping Speed / High Gas Load Requirement

Specifications

Choose product to view specifications

Model EST25N

Pumping Speed 50/60 Hz CFM 88
L/min 2,500
m3/Hr 150
Ultimate Pressure 50/60 Hz mTorr 20
Pa 2.67
mBar  0.267
Connection Gas Inlet NW 40
Gas Outlet NW 40
Power at Ultimate Pressure KW 3
Maximum Power KW 5.5
Cooling Water Requirements Min. Flow Rate 
L/min
5

Bearing and Dilution N2

Bearing Seals
L/min
8 to 10
Cabinet Dimensions
LxWxH
inches 39 x 16 x 19.7 
mm 990 x 410 x 501
Weight lbs 661 
kg 300

Model EST100WN

Pumping Speed 50/60 Hz CFM 353
L/min 10,000
m3/Hr 600
Ultimate Pressure 50/60 Hz mTorr  3
Pa 0.4
mBar 0.004
Connection Gas Inlet NW 50
Gas Outlet NW 40
Power at Ultimate Pressure KW 3.8
Maximum Power KW 7.7
Cooling Water Requirements Min. Flow Rate 
L/min
5

Bearing and Dilution N2

Bearing Seals
L/min
14 to 17
Cabinet Dimensions
LxWxH
inches 39 x 16 x 33.5 
mm 990 x 410 x 851
Weight lbs 926 
kg 420

Model EST200WN

Pumping Speed 50/60 Hz CFM 707
L/min 20,000
m3/Hr 1,200
Ultimate Pressure 50/60 Hz mTorr  3
Pa 0.4
mBar 0.004
Connection Gas Inlet ISO 100
Gas Outlet NW 40
Power at Ultimate Pressure KW 3.9
Maximum Power KW 7.8
Cooling Water Requirements Min. Flow Rate 
L/min
5

Bearing and Dilution N2

Bearing Seals
L/min
14 to 17
Cabinet Dimensions
LxWxH
inches 39 x 16 x 33.5 
mm 990 x 410 x 851
Weight lbs 992 
kg 450

Model EST300WN

Pumping Speed 50/60 Hz CFM 1,060
L/min 30,000
m3/Hr 1,800
Ultimate Pressure 50/60 Hz mTorr  3
Pa 0.4
mBar 0.004
Connection Gas Inlet ISO 160
Gas Outlet NW 40
Power at Ultimate Pressure KW 4.5
Maximum Power KW 9.5
Cooling Water Requirements Min. Flow Rate 
L/min
5

Bearing and Dilution N2

Bearing Seals
L/min
14 to 17
Cabinet Dimensions
LxWxH
inches 39 x 20.5 x 34.4
mm 990 x 520 x 873
Weight lbs 1102
kg 500

Model EST500WN

Pumping Speed 50/60 Hz CFM 1767
L/min 50,000
m3/Hr 3,000
Ultimate Pressure 50/60 Hz mTorr  3
Pa 0.4
mBar 0.004
Connection Gas Inlet ISO 160
Gas Outlet NW 40
Power at Ultimate Pressure KW 4.6
Maximum Power KW 11.3
Cooling Water Requirements Min. Flow Rate 
L/min
5

Bearing and Dilution N2

Bearing Seals
L/min
16 to 18
Cabinet Dimensions
LxWxH
inches 39 x 20.5 x 34.4
mm 990 x 520 x 873
Weight lbs 1212 
kg 550
 

Model EST800WN