Harsh Duty - Model EV-M

Model EV-M Dry Vacuum Pumps

The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 2,000 Lit/min up to 80,000 Lit/min pumping speed. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.

Features & Benefits

  • Enhancement for Product Throughput
  • Lower Cost of Ownership
  • Reducing Installation Space
  • Harsh Process Capability
  • Environmental-Responsive
  • High Torque Motor
  • Exhaust Jacket Heater
  • Electrical Plating on Rotor/Casing
  • Hot N2 Unit
  • BP Cooling Jacket
  • Water Leak Detector
  • SEMI, NRTL/CE

Applications

  • Metal Etch
  • PE-CVD
  • LP-CVD
  • TEOS
  • Nitride
  • Oxide

Specifications

Choose product to view specifications

Model EV-M20N

  Units EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M802N
Pumping Speed CFM 63.6 353.1 706.3 1059.4 1765.7 2825.2
L/min 1800 10000 20000 30000 50000 80000
M3/Hr 108 600 1200 1800 3000 4800
Ultimate Pressure Torr 0.04 0.004
Pa 5 0.5
mBar 0.05 0.0005
Connection Gas Inlet NW40 ISO100 ISO160 ISO200
Gas Outlet NW40
Approx. Power at Ultimate Pressure kW 1.2 1.8 1.9 2.5 2.1 2.8
Utility Cooling Water Flow Rate L/min 3~8 3.5~8.0 4.0-8.0 5.0-8.0
Temperature °C Max. 30
  °F Max. 86
N2 Gas Approx. Flow Rate   26-31 38-33
Power Supply Phase / Volt / Freq. 200V Model 3 Phase / 200V / 50Hz
3 Phase / 200-220V / 60Hz
400V Model 3 Phase / 380-400V / 50Hz
3 Phase / 380 - 440V / 60Hz
460V Model 3 Phase / 440-460V / 50Hz
3 Phase / 440-480V / 60Hz
Power Capacity kVA 3.3 5.4 6 6.8 7.1 8.3
Weight lbs 374.8 705.5 793.7 881.8 1102.3 1631.4
kg 170 320 360 400 500 740

Model EV-M102N

  Units EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M802N
Pumping Speed CFM 63.6 353.1 706.3 1059.4 1765.7 2825.2
L/min 1800 10000 20000 30000 50000 80000
M3/Hr 108 600 1200 1800 3000 4800
Ultimate Pressure Torr 0.04 0.004
Pa 5 0.5
mBar 0.05 0.0005
Connection Gas Inlet NW40 ISO100 ISO160 ISO200
Gas Outlet NW40
Approx. Power at Ultimate Pressure kW 1.2 1.8 1.9 2.5 2.1 2.8
Utility Cooling Water Flow Rate L/min 3~8 3.5~8.0 4.0-8.0 5.0-8.0
Temperature °C Max. 30
  °F Max. 86
N2 Gas Approx. Flow Rate   26-31 38-33
Power Supply Phase / Volt / Freq. 200V Model 3 Phase / 200V / 50Hz
3 Phase / 200-220V / 60Hz
400V Model 3 Phase / 380-400V / 50Hz
3 Phase / 380 - 440V / 60Hz
460V Model 3 Phase / 440-460V / 50Hz
3 Phase / 440-480V / 60Hz
Power Capacity kVA 3.3 5.4 6 6.8 7.1 8.3
Weight lbs 374.8 705.5 793.7 881.8 1102.3 1631.4
kg 170 320 360 400 500 740

Model EV-M202N

  Units EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M802N
Pumping Speed CFM 63.6 353.1 706.3 1059.4 1765.7 2825.2
L/min 1800 10000 20000 30000 50000 80000
M3/Hr 108 600 1200 1800 3000 4800
Ultimate Pressure Torr 0.04 0.004
Pa 5 0.5
mBar 0.05 0.0005
Connection Gas Inlet NW40 ISO100 ISO160 ISO200
Gas Outlet NW40
Approx. Power at Ultimate Pressure kW 1.2 1.8 1.9 2.5 2.1 2.8
Utility Cooling Water Flow Rate L/min 3~8 3.5~8.0 4.0-8.0 5.0-8.0
Temperature °C Max. 30
  °F Max. 86
N2 Gas Approx. Flow Rate   26-31 38-33
Power Supply Phase / Volt / Freq. 200V Model 3 Phase / 200V / 50Hz
3 Phase / 200-220V / 60Hz
400V Model 3 Phase / 380-400V / 50Hz
3 Phase / 380 - 440V / 60Hz
460V Model 3 Phase / 440-460V / 50Hz
3 Phase / 440-480V / 60Hz
Power Capacity kVA 3.3 5.4 6 6.8 7.1 8.3
Weight lbs 374.8 705.5 793.7 881.8 1102.3 1631.4
kg 170 320 360 400 500 740

Model EV-M302N

  Units EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M802N
Pumping Speed CFM 63.6 353.1 706.3 1059.4 1765.7 2825.2
L/min 1800 10000 20000 30000 50000 80000
M3/Hr 108 600 1200 1800 3000 4800
Ultimate Pressure Torr 0.04 0.004
Pa 5 0.5
mBar 0.05 0.0005
Connection Gas Inlet NW40 ISO100 ISO160 ISO200
Gas Outlet NW40
Approx. Power at Ultimate Pressure kW 1.2 1.8 1.9 2.5 2.1 2.8
Utility Cooling Water Flow Rate L/min 3~8 3.5~8.0 4.0-8.0 5.0-8.0
Temperature °C Max. 30
  °F Max. 86
N2 Gas Approx. Flow Rate   26-31 38-33
Power Supply Phase / Volt / Freq. 200V Model 3 Phase / 200V / 50Hz
3 Phase / 200-220V / 60Hz
400V Model 3 Phase / 380-400V / 50Hz
3 Phase / 380 - 440V / 60Hz
460V Model 3 Phase / 440-460V / 50Hz
3 Phase / 440-480V / 60Hz
Power Capacity kVA 3.3 5.4 6 6.8 7.1 8.3
Weight lbs 374.8 705.5 793.7 881.8 1102.3 1631.4
kg 170 320 360 400 500 740

Model EV-M502N

  Units EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M802N
Pumping Speed CFM 63.6 353.1 706.3 1059.4 1765.7 2825.2
L/min 1800 10000 20000 30000 50000 80000
M3/Hr 108 600 1200 1800 3000 4800
Ultimate Pressure Torr 0.04 0.004
Pa 5 0.5
mBar 0.05 0.0005
Connection Gas Inlet NW40 ISO100 ISO160 ISO200
Gas Outlet NW40
Approx. Power at Ultimate Pressure kW 1.2 1.8 1.9 2.5 2.1 2.8
Utility Cooling Water Flow Rate L/min 3~8 3.5~8.0 4.0-8.0 5.0-8.0
Temperature °C Max. 30
  °F Max. 86
N2 Gas Approx. Flow Rate   26-31 38-33
Power Supply Phase / Volt / Freq. 200V Model 3 Phase / 200V / 50Hz
3 Phase / 200-220V / 60Hz
400V Model 3 Phase / 380-400V / 50Hz
3 Phase / 380 - 440V / 60Hz
460V Model 3 Phase / 440-460V / 50Hz
3 Phase / 440-480V / 60Hz
Power Capacity kVA 3.3 5.4 6 6.8 7.1 8.3
Weight lbs 374.8 705.5 793.7 881.8 1102.3 1631.4
kg 170 320 360 400 500 740

Model EV-M802N

  Units EV-M20N EV-M102N EV-M202N EV-M302N EV-M502N EV-M802N
Pumping Speed CFM 63.6 353.1 706.3 1059.4 1765.7 2825.2
L/min 1800 10000 20000 30000 50000 80000
M3/Hr 108 600 1200 1800 3000 4800
Ultimate Pressure Torr 0.04 0.004
Pa 5 0.5
mBar 0.05 0.0005
Connection Gas Inlet NW40 ISO100 ISO160 ISO200
Gas Outlet NW40
Approx. Power at Ultimate Pressure kW 1.2 1.8 1.9 2.5 2.1 2.8
Utility Cooling Water Flow Rate L/min 3~8 3.5~8.0 4.0-8.0 5.0-8.0
Temperature °C Max. 30
  °F Max. 86
N2 Gas Approx. Flow Rate   26-31 38-33
Power Supply Phase / Volt / Freq. 200V Model 3 Phase / 200V / 50Hz
3 Phase / 200-220V / 60Hz
400V Model 3 Phase / 380-400V / 50Hz
3 Phase / 380 - 440V / 60Hz
460V Model 3 Phase / 440-460V / 50Hz
3 Phase / 440-480V / 60Hz
Power Capacity kVA 3.3 5.4 6 6.8 7.1 8.3
Weight lbs 374.8 705.5 793.7 881.8 1102.3 1631.4
kg 170 320 360 400 500 740