Model EV-M

Model EV-M Dry Vacuum Pumps

The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 2,000 Lit/min up to 80,000 Lit/min pumping speed. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.

Features & Benefits

  • Enhancement for product throughput
  • Lower Cost of Ownership
  • Reducing Installation Space
  • Harsh Process Capability
  • Environmental-Responsive
  • High torque motor
  • Exhaust Jacket Heater
  • Electrical Plating on Rotor/Casing
  • Hot N2 Unit
  • BP cooling jacket
  • Water Leak Detector
  • SEMI, NRTL/CE

Applications

  • Metal Etch
  • PE-CVD
  • LP-CVD
  • TEOS
  • Nitride
  • Oxide

Specifications

Choose product to view specifications

Model EV-M20N

Model EV-M102N

Model EV-M202N

Model EV-M302N

Model EV-M502N

Model EV-M802N