Model EV-S

Model EV-S Dry Vacuum Pumps

The EV-S Series pumps are energy efficient vacuum pumps for clean to light duty processes.The pumping speeds range from 58 to 710 CFM with an ultimate pressure as low as 3 mTorr.

Options include:

  • Nitrogen Purge
  • Niresist (Nickel alloy) to prevent corrosion 
  • Idle Mode allows the tool to send a remotely controlled signal to save additional energy.

Features & Benefits

  • Low Energy Consumption
  • Smallest Footprint
  • Excellent corrosion performance (N Type)
  • CE NRTL SEMI S2 Certified

Applications

  • SEM
  • Load Lock
  • MetalPDV
  • Dielectric ETCH
  • Ion Implant
  • Ashing

Specifications

Choose product to view specifications

Model EV-S20

  Units EV-S20 EV-S20P EV-S20N
Max Pumping Speed CFM 59 59 59
L/min 1670 1670 1670
M3/Hr 100 100 100
Ultimate Pressure Torr 2.25E-02 3.75E-02 3.75E-02
Pa 3 5 5
mBar 0.03 0.05 0.05
Connection Gas Inlet NW50 NW50 NW50
Gas Outlet NW25 NW25 NW25
Power at Ultimate Pressure KW 0.4 0.4 0.4
Maximum Power KW 2.2 2.2 2.2
Cooling Water Requirements L/min 1.5 - 3.0 1.5 - 3.0 1.5 - 3.0
Cabinet Dimensions inches 17.7 x 9.1 x 10.8 17.7 x 9.1 x 10.8 17.7 x 9.1 x 10.8
Size (LxWxH) mm 451 x 230 x 274 451 x 230 x 274 451 x 230 x 274
Weight lbs 132.3 132.3 132.3
kg 60 60 60

Model EV-S50

  Units EV-S50 EV-S50P EV-S50N
Max Pumping Speed CFM 177 177 177
L/min 5,000 5,000 5,000
m3/Hr 300 300 300
Ultimate Pressure Torr 3.75E-02 3.75E-02 3.75E-02
Pa 0.5 0.5 0.5
mBar 0.005 0.005 0.005
Connection Gas Inlet NW50 NW50 NW50
Gas Outlet NW25 NW25 NW25
Power at Ultimate Pressure KW 0.55 0.55 0.55
Maximum Power KW 3.6 3.6 3.6
Cooling Water Requirements L/min 2.0 - 3.0 2.0 - 3.0 2.0 - 3.0
Cabinet Dimensions inches 17.7 x 9.1 x 20.5 17.7 x 9.1 x 20.5 17.7 x 9.1 x 20.5
Size (LxWxH) mm 450 x 230 x 520 450 x 230 x 520 450 x 230 x 520
Weight lbs 220.4 220.4 220.4
kg 100 100 100

Model EV-S100

  Units EV-S100 EV-S100P EV-S100N
Max Pumping Speed CFM 353.1 353.1 353.1
L/min 10,000 10,000 10,000
m3/Hr 600 600 600
Ultimate Pressure Torr 3.75E-02 3.75E-02 3.75E-02
Pa 0.5 0.5 0.5
mBar 0.005 0.005 0.005
Connection Gas Inlet ISO80 ISO80 ISO80
Gas Outlet NW40 NW40 NW40
Power at Ultimate Pressure KW 0.65 0.65 0.65
Maximum Power KW 4.6 4.6 4.6
Cooling Water Requirements L/min 2.0 - 3.0 2.0 - 3.0 2.0 - 3.0
Cabinet Dimensions inches 20.1 x 10.2 x 21.7 20.1 x 10.2 x 21.7 20.1 x 10.2 x 21.7
Size (LxWxH) mm 510 x 260.1 x 549.9 510 x 260.1 x 549.9 510 x 260.1 x 549.9
Weight lbs 264.6 264.6 264.6
kg 120.0 120.0 120.0

Model EV-S200

  Units EV-S200 EV-S200P EV-S200N
Max Pumping Speed CFM 706.2 706.2 706.2
L/min 20,000 20,000 20,000
m3/Hr 1200 1200 1200
Ultimate Pressure Torr 3.75E-02 3.75E-02 3.75E-02
Pa 0.5 0.5 0.5
mBar 0.005 0.005 0.005
Connection Gas Inlet ISO100 ISO100 ISO100
Gas Outlet NW40 NW40 NW40
Power at Ultimate Pressure KW 0.75 0.75 0.75
Maximum Power KW 5.1 5.1 5.1
Cooling Water Requirements L/min 2.0 - 3.0 2.0 - 3.0 2.0 - 3.0
Cabinet Dimensions inches 25.6 x 10.8 x 24 25.6 x 10.8 x 24 25.6 x 10.8 x 24
Size (LxWxH) mm 650 x 275.1 x 610.1 650 x 275.1 x 610.1 650 x 275.1 x 610.1
Weight lbs 374.8 374.8 374.8
kg 170.0 170.0 170.0