Foreline Traps

Foreline Traps

We offer a variety of standard and custom foreline traps designed for trapping toxic gasses and particulate created when manufacturing semiconductors and photovoltaic cells. To determine which type of foreline trap is right for your application, please view additional information, or call Ebara at 800-535-5376.

Metal Sieve

Metal Sieve

Metal sieve traps make use of fibrous stainless steel sieves in order to remove hydrocarbons that backstream toward the chamber when vacuum pump oil is at its vapor pressure.

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Molecular Sieve

Molecular Sieve

Molecular sieve traps remove hydrocarbons that backstream toward the chamber while also trapping water vapor and other gasses before they reach the pump and contaminate the pump oil.

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Particulate

Particulate

Particulate traps remove particles over 10 microns in size at 98% efficiency to prevent contamination of the mechanical pump and oil.

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LPCVD-TEOS

LPCVD-TEOS

LPCVD-TEOS multi-stage traps are used to collect and remove gasses and liquids that would otherwise slow your system’s throughput and create unnecessary wear and tear.

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Water Cooled

Water Cooled

Water-cooled traps are used for trapping condensable process gasses and their by-products, thus extending maintenance intervals or even eliminating the need for maintenance.

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Liquid Nitrogen

Liquid Nitrogen

Liquid nitrogen traps are used to prevent mechanical pump oil vapors from contaminating the vacuum chamber and trap condensable gasses before they enter the pump.

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Custom

Custom

If you have a specific need or application not met by our standard foreline traps, we can alter any of our traps, or customize a trap to meet your needs – just contact us to get started.

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Reverse Pulse Technology

Reverse Pulse Technology

EBARA designs and manufactures application-specific filtration products capable of operating in harsh environments while safeguarding operators and mission critical equipment. The EBARA Reverse Pulse Filter integrates proven reverse pulse technology to extend maintenance intervals, resulting in increased run time, fewer element changes, and reduced maintenance costs.

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