Custom

Custom Traps

Standard trap designs are readily altered or custom models are designed and fabricated to improve performance for your specific application. Some examples are described below. Call for more information or to discuss your specific needs.

Liquid Recovery Traps

Ebara has provided many types of condensation traps for liquid collection before they enter the pump. Often they have valves or drains to allow the liquid to be collected and reused. Some of the liquids collected include photoresist, oil and tantalum.

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High Capacity Particulate Traps

High Capacity Particulate Traps

Ebara can provide high-capacity particle traps with multi-liter capacities for applications with large particle loads, such as silicon wafer processing.

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High Capacity Water Cooled Traps

Semiconductor CVD equipment manufacturers require high wafer counts between preventative maintenance. Unlike other manufacturers who offer one solution to fit a number of applications, Ebara will design high-capacity water-cooled traps to achieve specific customer-stated goals. Port geometry, capacity, conductance and efficiency are adjusted in order to produce the optimal design for the application. Examples of processes we have provided solutions for include TiN barrier layer deposition, LPCVD Nitride and III -Vs MOC VD.

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Liquid Nitrogen Traps

Liquid Nitrogen Traps

High capacity liquid nitrogen traps can be furnished for customers who require larger LN2 capacity to extend the time between refills or larger trapping capacity for condensable by-product.

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Multistage Traps

Multistage traps can be furnished for processes that require a combination of trap media, such as water-cooling and particle filtration. The trap shown here was developed for a GaAs MOC VD process. The first stage particle filter removes heavy metals, while the water cooled second stage collects sulfur.

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