Foreline Traps General

Foreline Traps Guide

Protecting your vacuum pump investment is the key to stretching your dollars. By utilizing EBARA's Foreline traps, you will extend the maintenance interval on your vacuum pump. Our experience, coupled with a broad product offering, allows us to integrate components and provide comprehensive solutions to semiconductor fabs and equipment manufacturers.

To improve overall system performance and achieve your defined goals, a thorough evaluation of the system is conducted. To show you the benefits of using a foreline trap to protect your vacuum pump, we provide clients with a cost-of-ownership model shows your return on investment from increased tool utilization and decreased planned and unplanned maintenance costs.

Foreline traps, thermal products, valves and weldments can be provided as turnkey modules. Thermal and vacuum characterization can be performed at Ebara before the assembly is supplied, leak checked, blanked off and clean room packaged.

Foreline Trap Selection Guide

  TRAP TYPE METAL SIEVE MOLECULAR COLD PARTICULATE
  FILTER MATERIAL STAINLESS STEEL COPPER ZEOLITE LN2  H2O POLYESTER FIBERGLASS

T
R
A
P

A
P
P
L
I
C
A
T
I
O
N

OIL BACKSTREAM •• •• •• •••      
WATER VAPOR     •• •••      
ORGANICS       ••    
ACID VAPORS       ••      
PARTICLES < 149°C       ••• •••
PARTICLES < 370°C         •••
CONDENSIBLES - LOW VAPOR PRESSURE •• ••   ••• •••    
CONDENSIBLES - HIGH VAPOR PRESSURE   •••    

Blank - Trap is not appropriate for this application   • - Good performance for this application
•• - Better performance for this application   ••• - Best performance for this application 

Part Numbering

Specifications

When ordering a trap with options, please follow the option tree below. Note: All options are not available on some body sizes or trap types.

Body Flange Options
 
OPTION FITS BODY OD
-BF 4
-BF 6
-BF 8

These ISO clamp style flanges are an alternative to V-clamps. Not available on sealed coaxial metal traps, or 2" or 41/2" trap bodies. 

Copper Sieve Options
 
OPTION FITS TRAP TYPE
-CF Metal sieve

The standard metal sieve filter is stainless steel. Copper metal sieve filters are available at no additional cost for all sealed and two-piece metal sieve traps. 

240V Heater Options
 
OPTION FITS TRAP TYPE
-240V Molecular sieve

The standard molecular sieve trap regeneration heater is 120V. 240V heaters are available as an option at no additional cost. Other voltages available. 

Quick Disconnect Options
 
OPTION FITS TRAP TYPE
-QD Water Cooled

Immediately shuts off water flow from both directions for single-handed, no-spill removal of a water cooled trap from the system for preventative maintenance or O-ring replacement. 

Fiberglass Particulate Filter Options
 
OPTION FITS TRAP TYPE
-F Particulate

For temperatures up to 370÷C. 

High Capacity Particulate Filter Options
 
OPTION FITS TRAP TYPE
-L7 Particulate

This fiberglass filter provides a reservoir for applications with heavy particle loads that might block the inlet.