LPCVD-TEOS

LPCVD-TEOS Traps

Increase your system's throughput and extend preventative maintenance intervals by tw times or more with Ebara's LPCVD/TEO S multistage foreline traps. The first stage is a stainless steel gauze filter which collects crystalline TEO S before it reaches downstream piping and isolation valves.

The second stage is a 10 micron fiberglass filter which removes silicon dioxide which causes frequent PM's in throttling butterfly valves.

The third and final stage is a reservoir which collects liquid TEOS without restricting foreline conductance. The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. Standard finish is beadblasted. Electropolish is available on request.

Specifications

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One Stage

Material
   Trap Body: 304 stainless steel
   Flanges: 304 stainless steel
   Filter: Stainless steel gauze
Vacuum range: >= 1 x 10-8 Torr
Temperature range: -20°C to 150°C
 

Additional Information

Model Info

MODEL NUMBER BODY
OD
PORT
CONFIGURATION
FLANGES PORT
ID
A B C
CTT1-8-3002-ISO 8 Coaxial ISO-80 3 16.84 9.00 -
ATT1-8-3002-ISO 8 Angle ISO-80 3 15.09 5.75 12.06
CTT1-8-4002-ISO 8 Coaxial ISO-100 4 16.84 9.00 -
ATT1-8-4002-ISO 8 Angle ISO-100 4 15.09 5.75 12.06

Two Stage

Material
   Trap Body: 304 stainless steel
   Flanges: 304 stainless steel
   Filter: Stainless steel gauze
Vacuum range: >= 1 x 10-8 Torr
Temperature range: -20°C to 150°C

Additional Information

MODEL NUMBER BODY
OD
PORT
CONFIGURATION
FLANGES PORT
ID
A B C
CTT2-8-3002-ISO 8 Coaxial ISO-80 3 19.12 9.45 -
ATT2-8-3002-ISO 8 Angle ISO-80 3 21.00 5.75 18.00
CTT2-8-4002-ISO 8 Coaxial ISO-100 4 19.12 9.45 -
ATT2-8-4002-ISO 8 Angle ISO-100 4 21.00 5.75 18.00

Three Stage

Material
   Trap Body: 304 stainless steel
   Flanges: 304 stainless steel
   Filter: Stainless steel gauze
Vacuum range: >= 1 x 10-8 Torr
Temperature range: -20°C to 150°C

Additional Information

MODEL NUMBER BODY
OD
PORT
CONFIGURATION
FLANGES PORT
ID
A B C
CTT3-8-3002-ISO 8 Coaxial ISO-80 3 19.12 9.45 -
ATT3-8-3002-ISO 8 Angle ISO-80 3 21.00 5.75 18.00
CTT3-8-4002-ISO 8 Coaxial ISO-100 4 19.12 9.45 -
ATT3-8-4002-ISO 8 Angle ISO-100 4 21.00 5.75 18.00