Ozone
Ozone Systems

Ozone Systems

Ultra-High Concentration Clean Ozonizer - OZC Series

The ozonizer operates on the corona discharge principal (passing oxygen through an electric field of high potential) and employs a high performance trench discharger that differs from conventional ozone generator methods. The trench discharger is designed to have more surface area and is cooled by city water, creating large concentrations of ozone per unit discharge area.

Ozonized Water Generator - OZW Series

The EBARA Ozonized water generator is capable of continuously feeding clean Ozonized water to meet the requirements of next-generation wet processes through the use of the high concentration ozone generator, OZC Series, a Teflon® hollow fiber membrane and the particle-free pump.

Features & Benefits

  • Steadily produces large volumes of ozone at ultra high concentrations
  • Achieves ultra clean ozone through the implementation of ceramic-coated electrodes and a sapphire dielectric.
  • Reduced footprint due to high volumes of ozone produced per unit of discharge area.
  • Equipped with ozone leak detector as standard equipment.
  • S2-93 compliant design. CE model available.
  • Basic Operation: Oxygen is passed through the trench discharger (an electric field) thus ionizing the oxygen molecules to react and produce ozone gas. The customer then can take the ozone gas and uses per their application.

Applications

  • SACVD TEOS based SiO2 deposition
  • Dry photoresist ashing
  • Sputtering
  • Dry and wet cleaning
  • Surface oxidation
  • Annealing of oxide layers
  • Ultrapure water disinfecting

Specifications

MODEL RAW GAS FLOW
RATE (SLM)
OZONE CONCENTRATION
(VOL.%)
OZONE CONCENTRATION
(G/M3)
GAS PRESSURE AT DISCHARGE
CELL KPA (PSI)
OZC-1 2.5 9.3 200 150 (21.7)
OZC-4 10 9.3 200 150 (21.7)
OZC-10 25 9.3 200 150 (21.7)
OZC-16 40 9.3 200 150 (21.7)
OZC-20 50 9.3 200 150 (21.7)