Thermal Solutions

Thermal Management Systems for Gaslines and Forelines

Vacuum pump and gas lines have unique thermal challenges, including the poor conductivity of stainless steel, differing thermal masses of plumbing components, and ambient temperature changes between the cleanroom and subfab.

Our thermal management systems for vacuum pumps are designed to prevent condensation on gaslines and byproduct buildup in forelines to help ensure a stable production environment. These thermal regulation products complement our vacuum pump and abatement systems providing you with a complete exhaust management solution.

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Gasline

Gasline

EBARA provides OEM heater product lines to compliment its full line of vacuum pump and POU abatement systems.

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Foreline / Exhaust Line

Foreline / Exhaust Line

View our Foreline/Exhaust Line Thermal Solutions

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Controllers

Controllers

EBARA's EHG2 is a powerful thermal controller that integrates an adjustable set point temperature controller, high/low temperature alert, power switching device, and a high temperature safety limit.

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