Model EBT

Ceramic Bearing & Mechanical Bearing Turbo Pumps

The EBT Series consists of mechanical bearing compound turbomolecular pumps, which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series of turbo pumps are highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high tech manufacturing requirements.

The compound turbo pumps in the EBT Series can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high-volume light gas compression, making them ideal for UHV and analytical systems. The EBT70 and EBT240 pumps are available with an optional integrated controller.

All EBARA compound turbomolecular pumps are available with either water or fan cooling, and the EBT70 is available with convection cooling.

Features & Benefits

  • Installation in Any Orientation
  • Energy Savings
  • Quick Start up
  • Quick Shut down with air vent
  • Durable structure for Air Inrush
  • Compact Size
  • Serial Communication
  • Automatic Calibration
  • High Throughput
  • Vibration Free
  • Air or Water Cooled
  • Safety Standards UL, CE, SEMI, NRTL

Applications

  • Semiconductor
  • Photovoltaic
  • Electronic Parts Manufacturing
  • Analalical Equipment
  • Research and Development

Specifications

Choose product to view specifications

Model EBT70

Flange Inlet CF63
Outlet KF16
Volume Flow Rate N2 (L/s) 75
N2 with protective screen (L/s) 70
H2 (L/s) 45
Maximum Compression Ratio N2 1 x 108
H2 1 x 105
Ultimate Pressure Torr < 7.5 x 10-10
Pa < 1 x 10-7
Maximum Throughput N2 (sccm) 10
N2 (Pa x L/s) 18
Ar (sccm) 5
Ar (Pa x L/s) 9.2
Maximum Backing Pressure Torr 9.0
Pa 1200
Recommended Backing Pump L/min ≥ 25
CFM ≥ 0.8
Startup Time min 2.0 - 2.5
Shutdown Time min 20.0 - 25.0
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 90000
Installation Position   Any
Cooling System   Free Convection Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 8.0-38.0
Deg F 46-100
Major Materials   Al Alloy
Weight kg 5.0
lb 11.0
Bearing Life hours  
 

Model EBT220

Flange Inlet ISO-R100
Outlet KF25
Volume Flow Rate N2 (L/s) 220
N2 with protective screen (L/s) 210
H2 (L/s) 100
Maximum Compression Ratio N2 1 x 108
H2 4 x 102
Ultimate Pressure Torr < 7.5 x 10-9
Pa < 1 x 10-6
Maximum Throughput N2 (sccm) 400
N2 (Pa x L/s) 730
Ar (sccm) 400
Ar (Pa x L/s) 730
Maximum Backing Pressure Torr 2.0
Pa 260
Recommended Backing Pump L/min ≥ 80
CFM ≥ 2.8>
Startup Time min 1.0 - 1.2
Shutdown Time min 2.5 - 3.5
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 48000
Installation Position   Any
Cooling System   Water Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 10.0-35.0
Deg F 50-104
Major Materials   Al Alloy
Weight kg 5.5
lb 12.0>
Bearing Life hours  

Model EBT240

Flange Inlet CF100
Outlet KF25
Volume Flow Rate N2 (L/s) 240
N2 with protective screen (L/s) 230
H2 (L/s) 160
Maximum Compression Ratio N2 1 x 108
H2 4 x 104
Ultimate Pressure Torr < 3.8 x 10-9
Pa < 5 x 10-7
Maximum Throughput N2 (sccm) 70
N2 (Pa x L/s) 130
Ar (sccm) 50
Ar (Pa x L/s) 90
Maximum Backing Pressure Torr 5.3
Pa 700>
Recommended Backing Pump L/min ≥ 80
CFM ≥ 2.8>
Startup Time min 5.5 - 6.0
Shutdown Time min 45.0 - 50.0
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 48000
Installation Position   Any
Cooling System   Forced Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 8.0-38.0
Deg F 46-100>
Major Materials   Al Alloy
Weight kg 10.5
lb 23.1
Bearing Life hours 20,000

Model EBT350

Flange Inlet CF100
Outlet KF25
Volume Flow Rate N2 (L/s) 330
N2 with protective screen (L/s) 310
H2 (L/s) 210
Maximum Compression Ratio N2 1 x 108
H2 2 x 103
Ultimate Pressure Torr < 7.5 x 10-9
Pa < 1 x 10-6
Maximum Throughput N2 (sccm) 500
N2 (Pa x L/s) 920
Ar (sccm) 250
Ar (Pa x L/s) 460
Maximum Backing Pressure Torr 2.0
Pa 260>
Recommended Backing Pump L/min ≥ 80
CFM ≥ 2.8>
Startup Time min 2.0 - 2.5
Shutdown Time min 5.0 - 6.5
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 45000
Installation Position   Any
Cooling System   Forced Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 10.0-32.0
Deg F 50-90
Major Materials   Al Alloy
Weight kg 9.0
lb 19.8>
Bearing Life hours 20,000

Model EBT450

Flange Inlet CF160
Outlet KF25
Volume Flow Rate N2 (L/s) 450
N2 with protective screen (L/s) 430
H2 (L/s) 240
Maximum Compression Ratio N2 1 x 108
H2 2 x 103
Ultimate Pressure Torr < 7.5 x 10-9
Pa < 1 x 10-6
Maximum Throughput N2 (sccm) 500
N2 (Pa x L/s) 920
Ar (sccm) 250
Ar (Pa x L/s) 460
Maximum Backing Pressure Torr 2.0
Pa 260>
Recommended Backing Pump L/min ≥ 80
CFM ≥ 2.8>
Startup Time min 2.0 - 2.5
Shutdown Time min 5.0 - 6.5
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 45000
Installation Position   Any
Cooling System   Forced Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 10.0-32.0
Deg F 50-90>
Major Materials   Al Alloy
Weight kg 10.0
lb 22.0>
Bearing Life hours 20,000

Model EBT800

Flange Inlet CF160
Outlet KF40
Volume Flow Rate N2 (L/s) 820
N2 with protective screen (L/s) 750
H2 (L/s) 650
Maximum Compression Ratio N2 1 x 108
H2 1 x 104
Ultimate Pressure Torr < 7.5 x 10-9
Pa < 1 x 10-6
Maximum Throughput N2 (sccm) 330
N2 (Pa x L/s) 600
Ar (sccm) 300
Ar (Pa x L/s) 550
Maximum Backing Pressure Torr 2.5
Pa 330
Recommended Backing Pump L/min ≥ 250
CFM ≥ 8.8
Startup Time min 7.0 - 9.0
Shutdown Time min 27.0 - 32.0
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 33600
Installation Position   Any
Cooling System   Forced Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 10.0-32.0
Deg F 50-90
Major Materials   Al Alloy
Weight kg 27.0
lb 59.5
Bearing Life hours 30,000

Model EBT1100

Flange Inlet CF200
Outlet KF40
Volume Flow Rate N2 (L/s) 1100
N2 with protective screen (L/s) 1000
H2 (L/s) 720
Maximum Compression Ratio N2 1 x 108
H2 1 x 104
Ultimate Pressure Torr < 7.5 x 10-9
Pa < 1 x 10-6
Maximum Throughput N2 (sccm) 330
N2 (Pa x L/s) 600
Ar (sccm) 300
Ar (Pa x L/s) 550
Maximum Backing Pressure Torr 2.5
Pa 300
Recommended Backing Pump L/min ≥ 250
CFM ≥ 8.8
Startup Time min 7.0 - 9.0
Shutdown Time min 27.0 - 32.0
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 33600
Installation Position   Any
Cooling System   Forced Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 10.0-32.0
Deg F 50-90
Major Materials   Al Alloy
Weight kg 28.0
lb 61.7
Bearing Life hours 30,000

Model EBT1400

Flange Inlet CF200
Outlet KF40
Volume Flow Rate N2 (L/s) 1400
N2 with protective screen (L/s) 1300
H2 (L/s) 750
Maximum Compression Ratio N2 1 x 108
H2 4.3 x 103
Ultimate Pressure Torr < 7.5 x 10-9
Pa < 1 x 10-6
Maximum Throughput N2 (sccm) 450
N2 (Pa x L/s) 830
Ar (sccm) 250
Ar (Pa x L/s) 460
Maximum Backing Pressure Torr 2.5
Pa 330
Recommended Backing Pump L/min ≥ 250
CFM ≥ 8.8
Startup Time min 5.5 - 7.0
Shutdown Time min 15.0 - 18.0
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 33600
Installation Position   Any
Cooling System   Forced Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 10.0-32.0
Deg F 50-90
Major Materials   Al Alloy
Weight kg 30.0
lb 66.1
Bearing Life hours 30,000

Model EBT2400

Flange Inlet ISO-B250
Outlet KF40
Volume Flow Rate N2 (L/s) 2400
N2 with protective screen (L/s) 2300
H2 (L/s) 1100
Maximum Compression Ratio N2 1 x 108
H2 1400
Ultimate Pressure Torr < 7.5 x 10-9
Pa < 1 x 10-6
Maximum Throughput N2 (sccm) 900
N2 (Pa x L/s) 1600
Ar (sccm) 750
Ar (Pa x L/s) 1380
Maximum Backing Pressure Torr 1.5
Pa 200
Recommended Backing Pump L/min ≥ 500
CFM ≥ 17.6
Startup Time min 5.0 - 7.0
Shutdown Time min 15.0 - 18.0
Vibration Level (0 - peak) μm ≤ 0.2
Rated Rotational Speed min-1 31200
Installation Position   Any
Cooling System   Forced Air Cooling
Bearing System   Grease-Lubricated Ball Bearing
Permissible Ambient Temperature Deg C 10.0-32.0
Deg F 50-90
Major Materials   Al Alloy
Weight kg 45.0
lb 99.2
Bearing Life hours 30,000