Model ET
Model ET

Model ET

The ET Turbo pump is equipped with five-axis magnetic bearings to ensure high-speed rotor rotation and position. Operating in a wide pressure range, the ET Turbo pump is designed to withstand highly reactive gases with its corrosion resistance.

Features & Benefits

  • High gas flow and wide pressure range
  • Nickel plating on turbine blade for corrosive application
  • Optional heating mechanism preventing by-product accumulation
  • Intelligent interlock function

Specifications

  Model ET300W ET450W ET600W ET800W ETE801H ET1301W ET1600W
Pump Pumping Speed, L/s N2 320 460 600 770 800 1300 1600
H2 200 300 220 450 550 900 1000
Max. compression, L/s N2 >109 >109 >109 >109 >109 >108 >109
H2 7 x 103 5 x 103 104 2 x 106 2 x 103 104
Ultimate pressure, Pa 10-7 order 10-9 order 10-7order
Allowable outlet pressure, Pa 400 40 266 400
Flange standard Inlet side * 1 VG150 VG200 VG250
Outlet size KF25 KF40
Run-up time in vacuum, min 6 7 8 6 8
Revolution, min-1 48000 45000 35000 36000 38000 32000 30000
Installation position Any
Vibration level (at rated speeds) µm (0-P) < 0.01
Cooling system Water cooling
Cooling water flow rate, L/min > 2
Cooling water temperature, °C (°F) < 25 (77)
Weight of pump, kg (lb) 15 (33) 16 (35) 35 (77) 30 (66) 34 (75) 40 (88) 55 (121)
  Model 306W-TF 456W-TF 606W-TF 806W-TF 806H-TF 1306W-TF 1606W-TF
Controller Input Phase / Voltage Single - phase / AC100V~240V Single - phase / AC200V~240V
Current, A*2 5 (8) 9 11 805 5 12
Weight, kg (lb) 10 (22) 13 (39) 13 (39) 2 (26) 10 (22) 13 (39)
Allowable length of connection cable 3.5~20m (Tuning Free)
*1  Inlet ports are available for a flange
*2  () is Voltage 100V