Magnetic Levitated Turbo Pumps
The EMT Series offers five major types of magnetic turbomolecular pumps:
- corrosion resistant
- ultra-low vibration
- radiation resistant
- ultra-high vacuum
All EBARA mag-lev turbo pumps features a wide pressure range with maximum back pressure up to 3 Torr.
Temperature-Controlled Turbo Pump
The temperature controlled model reduces the condensation rate of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.
Ultra-High Vacuum Turbo Pump
Ultra-high vacuum models efficiently evacuate the lightest gases from high vacuum down to the ultra-high vacuum region by reducing the materials' outgassing and improving the efficiency of hydrogen compression. EBARA’s ultra-high vacuum turbomolecular pump can achieve 75 pTorr (10-8 Pa) with a short bake-out period.
Ultra-Low Vibration Turbo Pumps
EBARA’s ultra-low vibration model turbomolecular pump produce less than 1nm vibration amplitude – meeting today's cutting edge challenges in EUV lithography, Micro-machining (MEMS), CD line width measurement, SEM/TEM Electron Microscopy, XPS and Nano-technology analytical tools.