Model EMT

Magnetic Levitated Turbo Pumps

The EMT Series offers five major types of magnetic turbomolecular pumps:

  • temperature-controlled
  • corrosion resistant
  • ultra-low vibration
  • radiation resistant
  • ultra-high vacuum

All EBARA mag-lev turbo pumps features a wide pressure range with maximum back pressure up to 3 Torr.

Temperature-Controlled Turbo Pump

The temperature controlled model reduces the condensation rate of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

Ultra-High Vacuum Turbo Pump

Ultra-high vacuum models efficiently evacuate the lightest gases from high vacuum down to the ultra-high vacuum region by reducing the materials' outgassing and improving the efficiency of hydrogen compression. EBARA’s ultra-high vacuum turbomolecular pump can achieve 75 pTorr (10-8 Pa) with a short bake-out period.

Ultra-Low Vibration Turbo Pumps

EBARA’s ultra-low vibration model turbomolecular pump produce less than 1nm vibration amplitude – meeting today's cutting edge challenges in EUV lithography, Micro-machining (MEMS), CD line width measurement, SEM/TEM Electron Microscopy, XPS and Nano-technology analytical tools.

Features & Benefits

  • Full Magnetic Bearing
  • Installation in Any Orientation
  • High Throughput
  • Quick Starts and Stops
  • Compact Size
  • Serial Communication
  • Automatic Calibration
  • Rotational Speed Control
  • Energy Savings
  • Vibration Free
  • Air or Water Cooled
  • Safety Standards UL, CE, SEMI, NRTL

Specifications

Choose product to view specifications

Model EMT390

Flange Inlet ISO-B100 / CF100
Outlet NW 25
Volume Flow Rate N2 (L/s) 340
N2 with protective screen 320
H2 (L/s) 290
Maximum Compression Ratio N2 1x108
H2 4.5x103
Ultimate Pressure CF / ISO-B Torr < 7.5x10-9
Pa < 1x10-6
Allowable Outlet Pressure Torr 3
Pa 400
Maximum Throughput N(sccm) 2000
N2 (Pa x L/s) 3680
Ar (sccm) 700
Ar (Pa x L/s) 1290
Revolution Speed RPM 40,800
Startup Time Minutes 2 - 3
Shutdown Time Minutes 4 - 5
Installation Position   Any
Vibration Level (0 - peak)7 μm < 0.01
Pump Bake Out Temperature Deg C Max 120
Bearing System 5-axis magnetic bearing
Cooling System Water/Air
Cooling Water Flow Rate L/min 1.5
Recommended Backing pump L/min ≥ 160
N2 Gas Throughput for Purging sscm 10
Pa-L/sec 18.4
Weight ISO-B/CF lb 30/37
kg 14/17

Model EMT420

Additional Information

Flange Inlet ISO-B160 / CF160
Outlet NW 25
Volume Flow Rate N2 (L/s) 400
N2 with protective screen 370
H2 (L/s) 300
Maximum Compression Ratio N2 1x108
H2 4.5x103
Ultimate Pressure CF / ISO-B Torr < 7.5x10-9
Pa < 1x10-6
Allowable Outlet Pressure Torr 3
Pa 400
Maximum Throughput N2 (sccm) 2000
N(Pa x L/s) 3680
Ar (sccm) 700
Ar (Pa x L/s) 1290
Revolution Speed RPM 40,800
Startup Time Minutes 2 - 3
Shutdown Time Minutes 4 - 5
Installation Position   Any
Vibration Level (0 - peak)7 μm < 0.01
Pump Bake Out Temperature Deg C Max 120
Bearing System 5-axis magnetic bearing
Cooling System Water/Air
Cooling Water Flow Rate L/min 1.5
Recommended Backing pump L/min ≥ 160
N2 Gas Throughput for Purging sscm 10
Pa-L/sec 18.4
Weight ISO-B/CF lb 30/37
kg 14/17

Model EMT900

Flange Inlet ISO-B160 / CF160
Outlet NW 40
Volume Flow Rate N2 (L/s) 900
N2 with protective screen 860
H2 (L/s) 1050
Maximum Compression Ratio N2 1x108
H2 1.5x104
Ultimate Pressure CF / ISO-B Torr < 7.5x10-9
Pa < 1x10-6
Allowable Outlet Pressure Torr 3.8
Pa 500
Maximum Throughput N2 (sccm) 3000
N2 (Pa x L/s) 5520
Ar (sccm) 1500
Ar (Pa x L/s) 2760
Revolution Speed RPM 33,600
Startup Time Minutes 4 - 5
Shutdown Time Minutes 4 - 5
Installation Position   Any
Vibration Level (0 - peak)7 μm < 0.005
Pump Bake Out Temperature Deg C Max 120
Bearing System 5-axis magnetic bearing
Cooling System Water/Air
Cooling Water Flow Rate L/min 1.5
Recommended Backing pump L/min ≥ 250
N2 Gas Throughput for Purging sscm 20
Pa-L/sec 36.8
Weight ISO-B/CF lb 34/42
kg 75/92

Model EMT1300

Flange Inlet ISO-B200 / CF200
Outlet NW 40
Volume Flow Rate N2 (L/s) 1300
N2 with protective screen 1230
H2 (L/s) 1200
Maximum Compression Ratio N2 1x108
H2 1.5x104
Ultimate Pressure CF / ISO-B Torr < 7.5x10-9
Pa < 1x10-6
Allowable Outlet Pressure Torr 3.8
Pa 500
Maximum Throughput N2 (sccm) 3000
N2 (Pa x L/s) 5520
Ar (sccm) 1500
Ar (Pa x L/s) 2760
Revolution Speed RPM 33,600
Startup Time Minutes 4 - 5
Shutdown Time Minutes 4 - 5
Installation Position   Any
Vibration Level (0 - peak)7 μm < 0.005
Pump Bake Out Temperature Deg C Max 120
Bearing System 5-axis magnetic bearing
Cooling System Water/Air
Cooling Water Flow Rate L/min 1.5
Recommended Backing pump L/min ≥ 250
N2 Gas Throughput for Purging sscm 20
Pa-L/sec 36.8
Weight ISO-B/CF lb 34/42
kg 75/92

Model EMT2200

Inlet flange   ISO-B250
Outlet flange   NW40, NW50
Input voltage   200 - 240 VAC - 15%+10%
   Phase   Single
   Frequency   50/60 Hz
   Current
   Power
  Max. 5.3 A
Max. 0.9 kVA
Pumping Speed, L/s N2 2200
N2 with protective screen 2100
H2 1800
Maximum compression ratio N2 >2x108
H2 3x103
Ultimate pressure Pa (Torr) <1x10-6 (7.5x10-9)
Maximum foreline pressure Pa (Torr) 100 (0.75)
Maximum Throughput N2 5520 Pa L/s (3000 sccm)
Ar 4790 Pa L/s (2600 sccm)
Mounting orientation   Any
Communication module   Parallel I/O, RS232C, RS485, Profibus, or DeviceNet
Cooling system   Water cooling
Weight kg (lbs) 62 (137)
 

Model EMT2400

Flange Inlet ISO-B250
Outlet NW 40
Volume Flow Rate N2 (L/s) 2400
N2 with protective screen 2300
Ar (L/s) 2100
H2 (L/s) 1100
Maximum Compression Ratio N2 1x108
H2 1.4x103
Ultimate Pressure CF / ISO-B Torr < 7.5x10-9
Pa < 1x10-6
Allowable Outlet Pressure Torr 1.5
Pa 200
Maximum Throughput N2 (sccm) 3000
N2 (Pa x L/s) 5520
Ar (sccm) 2000
Ar (Pa x L/s) 3680
Revolution Speed RPM 31,200
Startup Time Minutes 4 - 5
Shutdown Time Minutes 4 - 5
Installation Position   Any
Vibration Level (0 - peak)7 μm < 0.005
Pump Bake Out Temperature Deg C Max 120
Bearing System 5-axis magnetic bearing
Cooling System Water/Air
Cooling Water Flow Rate L/min 1.5
Recommended Backing pump L/min ≥ 500
N2 Gas Throughput for Purging sscm 20
Pa-L/sec 36.8
Weight ISO-B/CF lb 99/118
kg 45/54

Model EMT3260

Flange Inlet ISO-B320
Outlet NW 40
Volume Flow Rate N(L/s) 3200
N2 with protective screen 3000
H2 (L/s) 2700
Maximum Compression Ratio N2 1x108
H2 3x104
Ultimate Pressure CF / ISO-B Torr < 7.5x10-9
Pa < 1x10-6
Allowable Outlet Pressure Torr 3
Pa 400
Maximum Throughput N2 (sccm) 2000
N2 (Pa x L/s) 3680
Ar (sccm) -
Ar (Pa x L/s) -
Revolution Speed RPM -
Startup Time Minutes -
Shutdown Time Minutes -
Installation Position   Any
Vibration Level (0 - peak)7 μm -
Pump Bake Out Temperature Deg C -
Bearing System 5-axis magnetic bearing
Cooling System Water/Air
Cooling Water Flow Rate L/min -
Recommended Backing pump L/min ≥ 1500
N2 Gas Throughput for Purging sscm -
Pa-L/sec -
Weight ISO-B/CF lb 176/211
kg 80/96