Vacuum Hardware

Vacuum Pump Parts & Hardware

We offer a complete line of stainless steel vacuum hardware designed to complement our dry pumps, turbo pumps and abatement systems. We have thousands of vacuum pump parts and other components in stock every day.

Whether you’re looking for replacement parts, or need to design a new system, we can help. Call us at 800-535-5376 for product information and availability.

Our selection of vacuum hardware includes:

Flanges & Fittings

We stock a variety of flanges and fittings, including ASA flanges and fittings, ISO flanges and fittings, KF flanges and fittings designed to ISO 2681, Conflat flanges and fittings, EVAC flanges and fittings (which are the standard for many Japanese-made semiconductors and their parts), and wire seal flanges and fittings designed for use on bell jars and custom vacuum chambers.

Adapters

We offer a broad range of flange-to-flange and flange-to-fitting adapters, including straight, conical and flex hose nipples, KF to fitting and conflate to fitting adapters, and tee, cross and zero-length adapters. All of our adapters are TIG welded, cleaned and leak-checked for vacuum service.

Tubing, Flex Hoses & Coupling

We offer tubing, hoses and coupling in stainless steel and PVC.

Welded Fittings

Our welded fittings come in a variety of styles of tees and crosses, which are all fabricated with the pulled-port technique, resulting in crevice-free weld joints.

Already know what you're looking for? Choose below:

EVAC

EVAC

Ebara stocks a complete line of EVAC chain clamps and aluminum metal seals for converting elastomer seal KF and ISO flanges to UHV metal seals. They provide a number of benefits over elastomer seals: 

  • Reduced outgassing
  • No permeation
  • No hydrocarbons
  • Resistance to radiation
  • Short half-life 
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KF

KF

Ebara Technologies, Inc. offers a wide range of KF flanges, fittings and accessories to fit your needs.

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ISO

ISO

Ebara ISO flanges and hardware are manufactured to the International Standards Organization specification so they can be mated to other manufacturers' ISO flanges.

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ASA

ASA

Ebara's ASA flanges are manufactured from specially treated 304 stainless steel. These flanges mate with standard 150 lb. ASA flanges or 150 ANSI flanges. They are available from stock for standard tube sizes from 2 to 12 inches. Larger sizes are available upon request.

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Conflat

Conflat

Ebara CF flanges are compatible with other Conflat style flanges and are available in sizes from 1-1/3 to 16-1/2 inch OD for 1/4 to 14 inch tube diameters. Flanges 41/2 inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths.

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Wire Seal

Wire Seal

Ebara wire seal flanges are designed for use on bell jars, custom vacuum chambers and related systems. Standard sizes range from 12 to 27 inch nominal OD for tube sizes from 10 to 24 inch OD. A male and female flange compress a 0.080 inch diameter OFHC copper wire to effect a seal. Gasket flow is confined by the geometry of the flange surfaces to the area of the seal.

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Adapters

Adapters

Ebara provides a broad range of adapter fittings in order to connect two dissimilar types of components. They are made from 304 or 316L stainless steel and are TI G welded, cleaned and leak checked for vacuum service. Tube finishes are normally bead blasted. However, tumbled or electropolished finish can be provided upon request.

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Tubing, Flex Hoses & Coupling

Tubing, Flex Hoses & Coupling

Ebara  can provide 304 and 316L stainless steel tubing in lengths up to 20 feet. 304 stainless steel tubing standard finishes are white pickled (Number 1 unpolished), bright annealed or polished OD and ID, depending on the size. 316L stainless steel tubing is offered with a bright annealed finish only. Bright annealed and polished tubing has been pickled and passivated. Polished tube can be described as No. 4 polished. The surface meets ASTM A270, and has received a 150 grit polish on the OD and 180 grit on the ID. Special cleaning, materials and surface finishes are available for an additional charge.

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Welded Fittings

Welded Fittings

Weld fittings are commonly used in vacuum roughing lines on semiconductor process equipment and for forelines and pump exhaust lines in semiconductor subfabs. All tees and crosses are fabricated with the pulled-port technique and full penetration butt welds. This provides crevice-free weld joints and the maximum in cleanliness for UHV applications

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