Special Purpose Flanges

Special Purpose Flanges

EBARA's special purpose CF flanges are used as roughing accessories, accommodating thermocouple gauge tubes, up-to-air valves and/or NPT threaded fittings. Double-sided flanges are provided with one or more radially tapped holes. Blank flanges are provided with a single concentric 1/8 NPT tapped hole. Hardware for special purpose flanges is located on the appropriate flange size pages.

Specifications

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CF Double-Sided Special Purpose Flanges

SPECIFICATIONS
General: Rotatable or nonrotatable flanges with tapped or clearance bolt holes
Nominal OD sizes: 1-1/3 to 16-1/2 inches
Tube sizes: 1/4 to 14 inches
Materials
   Flange: 304 stainless steel (316L available on request)
   Gaskets: Viton, copper or silver plated
   Bolts: 18-8 stainless steel or silver plated
Vacuum range: 
   Metal seal: >= 1 x 10-13 Torr - UHV
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
Temperature range: 
   Metal seal: -200°C to 450°C 
   Elastomer seal: -20°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER FLANGE
OD
FEATURE DIAGRAM A B
133-D1 1.33 1/16" NPT hole A 0.25 0.5
275-D1 2.75 1/8" NPT hole A 0.38 0.75
133-D2 1.33 1/16" NPT holes B 0.25 0.5
275-D2 2.75 1/8" NPT holes B 0.38 0.75
133-DT 1.33 Thermocouple gauge tube C 0.25 0.5
275-DT 2.75 Thermocouple gauge tube C 0.38 0.75
133-DV 1.33 Up-to-air valve D 0.25 0.5
275-DV 2.75 Up-to-air valve D 0.38 0.75
133-DV-1/4 MVCR 1.33 Up-to-air valve & 1/4" Cajon male VCR fitting on valve D 0.25 0.5
275-DV-1/4 MVCR 2.75 Up-to-air valve & 1/4" Cajon male VCR fitting on valve D 0.38 0.75
133-DV-1/4 FVCR 1.33 Up-to-air valve & 1/4" Cajon female VCR fitting on valve D 0.25 0.5
275-DV-1/4 FVCR 2.75 Up-to-air valve & 1/4" Cajon female VCR fitting on valve D 0.38 0.75
133-DV-1/4 SWAG 1.33 Up-to-air valve & 1/4" Swagelok fitting on valve D 0.25 0.5
275-DV-1/4 2.75 Up-to-air valve & 1/4" Swagelok fitting on valve D 0.38 0.75
133-D1V 1.33 (1) 1/16" NPT hole & up-to-air valve F 0.25 0.5
275-D1V 2.75 (1) 1/16" NPT hole & up-to-air valve F 0.38 0.75
133-DTV 1.33 Thermocouple gauge tube & up-to-air valve E 0.25 0.5
275-DTV 2.75 Thermocouple gauge tube & up-to-air valve E 0.38 0.75
133-DTV-1/4 MVCR 1.33 Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon male VCR fitting on valve
E 0.25 0.5
275-DTV-1/4 MVCR 2.75 Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon male VCR fitting on valve
E 0.38 0.75
133-DTV-1/4 FVCR 1.33 Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon female VCR fitting on valve
E 0.25 0.5
275-DTV-1/4 FVCR 2.75 Thermocouple gauge tube & up-to-air valve with 1/4"
Cajon female VCR fitting on valve
E 0.38 0.75
133-DTV-1/4 SWAG 1.33 Thermocouple gauge tube & up-to-air valve with 1/4"
Swagelok fitting on valve
E 0.25 0.5
275-DTV-1/4 SWAG 2.75 Thermocouple gauge tube & up-to-air valve with 1/4"
Swagelok fitting on valve
E 0.38 0.75
275-DS-MINI 2.75 (1) 1.33" OD side port G 0.38 0.75

CF Straight-Through Special Purpose Flanges

SPECIFICATIONS
General: Rotatable or nonrotatable flanges with tapped or clearance bolt holes
Nominal OD sizes: 1-1/3 to 16-1/2 inches
Tube sizes: 1/4 to 14 inches
Materials
   Flange: 304 stainless steel (316L available on request)
   Gaskets: Viton, copper or silver plated
   Bolts: 18-8 stainless steel or silver plated
Vacuum range: 
   Metal seal: >= 1 x 10-13 Torr - UHV
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
Temperature range: 
   Metal seal: -200°C to 450°C 
   Elastomer seal: -20°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER FLANGE
OD
FEATURE DIAGRAM
133-ST 1.33 (1) 1/8" NPT hole A
275-ST 2.75 (1) 1/8" NPT hole A
133-STT 1.33 Thermocouple gauge tube B
275-STT 2.75 Thermocouple gauge tube B
133-STV 1.33 Up-to-air valve C
275-STV 2.75 Up-to-air valve C
133-STV-1/4 MVCR 1.33 Up-to-air valve and 1/4" Cajon male VCR fitting on valve C
275-STV-1/4 MVCR 2.75 Up-to-air valve and 1/4" Cajon male VCR fitting on valve C
133-STV-1/4 FVCR 1.33 Up-to-air valve and 1/4" Cajon female VCR fitting on valve C
275-STV-1/4 FVCR 2.75 Up-to-air valve and 1/4" Cajon female VCR fitting on valve C
133-STV-1/4 SWAG 1.33 Up-to-air valve and 1/4" Swagelok fitting on valve C
275-STV-1/4 SWAG 2.75 Up-to-air valve and 1/4" Swagelok fitting on valve C