ISO Fittings

ISO Fittings

The tube portions are fabricated from 304 stainless steel. For increased resistance to corrosion in downstream semiconductor processes, some ISO flanges and fittings are available in 316L stainless steel. Ebara makes its own elbows, and all tees and crosses are made with the pulled-port technique. This allows smooth, crevice-free butt welds to provide the maximum in cleanliness for UHV applications. Fittings are shown with OF flanges only. To order a fitting with nonrotatable flanges substitute ?-N? for ?-OF ? in the model number. Fittings are also available with CF (Conflat style), KF (ISO-KF compatible) and ASA flanges. Standard finish is bead blasted. Electropolished finish also available.

Specifications

Choose product to view specifications

ISO Half Nipple

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Additional Information

MODEL NUMBER TUBE OD A
1N-ISO-63-OF 2-1/2 3.25
1N-ISO-63-OF-V 2-1/2 4.00
1N-ISO-63-OF-H 2-1/2 3.94
1N-ISO-80-OF 3 3.50
1N-ISO-80-OF-H 3 3.94
1N-ISO-100-OF 4 4.13
1N-ISO-100-OF-V 4 5.12
1N-ISO-100-OF-H 4 3.94
1N-ISO-160-OF 6 5.38
1N-ISO-160-OF-V 6 6.44
1N-ISO-160-OF-H 6 3.94
1N-ISO-200-OF 8 7.38
1N-ISO-250-OF 10 9.88
1N-ISO-320-OF 12 9.88
1N-ISO-400-OF 16 9.88
1N-ISO-500-OF 20 9.88

ISO 316L Half Nipple

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE OD A
1N-ISO-63-OF-316L 2-1/2 3.25
1N-ISO-80-OF-316L 3 3.50
1N-ISO-100-OF-316L 4 4.13

ISO Full Nipple

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE OD A
2N-ISO-63-OF 2-1/2 6.50
2N-ISO-80-OF 3 7.00
2N-ISO-100-OF 4 8.26
2N-ISO-160-OF 6 10.76
2N-ISO-200-OF 8 14.76
2N-ISO-250-OF 10 19.76
2N-ISO-320-OF 12 19.76
2N-ISO-400-OF 16 19.76
2N-ISO-500-OF 20 19.76
 

ISO Reducer Nipple

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Additional Information

MODEL NUMBER FLANGE
1
FLANGE
2
TUBE
OD
2NR-ISO-80-63-OF ISO-80 ISO-63 2-1/2
2NR-ISO-100-63-OF ISO-100 ISO-63 2-1/2
2NR-ISO-100-80-OF ISO-100 ISO-80 3
2NR-ISO-160-63-OF ISO-160 ISO-63 2-1/2
2NR-ISO-160-80-OF ISO-160 ISO-80 3
2NR-ISO-160-100-OF ISO-160 ISO-100 4
2NR-ISO-200-63-OF ISO-200 ISO-63 2-1/2
2NR-ISO-200-80-OF ISO-200 ISO-80 3
2NR-ISO-200-100-OF ISO-200 ISO-100 4
2NR-ISO-200-160-OF ISO-200 ISO-160 6
2NR-ISO-250-63-OF ISO-250 ISO-63 2-1/2
2NR-ISO-250-80-OF ISO-250 ISO-80 3
2NR-ISO-250-100-OF ISO-250 ISO-100 4
2NR-ISO-250-160-OF ISO-250 ISO-160 6
2NR-ISO-250-200-OF ISO-250 ISO-200 8

ISO Conical Reducer Nipple

MODEL NUMBER FLANGE
1
FLANGE
2
TUBE
OD
2NR-ISO-80-63-OF ISO-80 ISO-63 2-1/2
2NR-ISO-100-63-OF ISO-100 ISO-63 2-1/2
2NR-ISO-100-80-OF ISO-100 ISO-80 3
2NR-ISO-160-63-OF ISO-160 ISO-63 2-1/2
2NR-ISO-160-80-OF ISO-160 ISO-80 3
2NR-ISO-160-100-OF ISO-160 ISO-100 4
2NR-ISO-200-63-OF ISO-200 ISO-63 2-1/2
2NR-ISO-200-80-OF ISO-200 ISO-80 3
2NR-ISO-200-100-OF ISO-200 ISO-100 4
2NR-ISO-200-160-OF ISO-200 ISO-160 6
2NR-ISO-250-63-OF ISO-250 ISO-63 2-1/2
2NR-ISO-250-80-OF ISO-250 ISO-80 3
2NR-ISO-250-100-OF ISO-250 ISO-100 4
2NR-ISO-250-160-OF ISO-250 ISO-160 6
2NR-ISO-250-200-OF ISO-250 ISO-200 8

Other Product Images

Additional Information

MODEL NUMBER FLANGE
1
FLANGE
2
TUBE
OD
2NR-ISO-80-63-OF ISO-80 ISO-63 2-1/2
2NR-ISO-100-63-OF ISO-100 ISO-63 2-1/2
2NR-ISO-100-80-OF ISO-100 ISO-80 3
2NR-ISO-160-63-OF ISO-160 ISO-63 2-1/2
2NR-ISO-160-80-OF ISO-160 ISO-80 3
2NR-ISO-160-100-OF ISO-160 ISO-100 4
2NR-ISO-200-63-OF ISO-200 ISO-63 2-1/2
2NR-ISO-200-80-OF ISO-200 ISO-80 3
2NR-ISO-200-100-OF ISO-200 ISO-100 4
2NR-ISO-200-160-OF ISO-200 ISO-160 6
2NR-ISO-250-63-OF ISO-250 ISO-63 2-1/2
2NR-ISO-250-80-OF ISO-250 ISO-80 3
2NR-ISO-250-100-OF ISO-250 ISO-100 4
2NR-ISO-250-160-OF ISO-250 ISO-160 6
2NR-ISO-250-200-OF ISO-250 ISO-200 8

ISO 45 Degree Radius Elbow with Tangents

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE
OD
A
2KL-ISO-63-OF 2-1/2 3.25
2KL-ISO-80-OF 3 3.93
2KL-ISO-100-OF 4 5.03
 

ISO 90 Degree Radius Elbow

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE
OD
A
2KL-ISO-63-OF 2-1/2 3.25
2KL-ISO-80-OF 3 3.93
2KL-ISO-100-OF 4 5.03

ISO 90 Degree Mitered Elbow

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE
OD
A
2E-ISO-63-OF-M 2-1/2 3.25
2E-ISO-80-OF-M 3 3.50
2E-ISO-100-OF-M 4 4.13
2E-ISO-160-OF-M 6 5.38
2E-ISO-200-OF-M 8 7.38
2E-ISO-250-OF-M 10 9.88
 

ISO Tee

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE
OD
A
3T-ISO-63-OF 21/2 3.25
3T-ISO-80-OF 3 3.50
3T-ISO-100-OF 4 4.13
3T-ISO-160-OF 6 5.38
3T-ISO-200-OF 8 7.38
3T-ISO-250-OF 10 9.88

ISO Reducer Tee

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER FLANGE 1 & 2
TYPE
FLANGE 1 & 2
ARM OD
FLANGE 3
TYPE
FLANGE 3
LEG OD
A B
3TR-ISO-80-63-OF ISO-80 3 ISO-63 21/2 3.50 3.50
3TR-ISO-100-63-OF ISO-100 4 ISO-63 21/2 4.13 4.00
3TR-ISO-100-80-OF ISO-100 4 ISO-80 3 4.13 4.00
3TR-ISO-160-63-OF ISO-160 6 ISO-63 21/2 5.38 5.00
3TR-ISO-160-80-OF ISO-160 6 ISO-80 3 5.38 5.00
3TR-ISO-160-100-OF ISO-160 6 ISO-100 4 5.38 5.13
3TR-ISO-200-63-OF ISO-200 8 ISO-63 21/2 7.38 6.00
3TR-ISO-200-80-OF ISO-200 8 ISO-80 3 7.38 6.00
3TR-ISO-200-100-OF ISO-200 8 ISO-100 4 7.38 6.13
3TR-ISO-200-160-OF ISO-200 8 ISO-160 6 7.38 6.38

ISO 4-Way Cross

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE
OD
A
4C-ISO-63-OF 2-1/2 3.25
4C-ISO-80-OF 3 3.50
4C-ISO-100-OF 4 4.13
4C-ISO-160-OF 6 5.38
4C-ISO-200-OF 8 7.38
4C-ISO-250-OF 10 9.88

ISO 4-Way Reducer Cross

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER FLANGES 1 & 2
TYPE
FLANGES 1 & 2
ARM OD
FLANGE 3
TYPE
FLANGE 3
LEG OD
A B
4CR-ISO-80-63-OF ISO-80 3 ISO-63 2-1/2 3.50 3.50
4CR-IS0-100-63-OF ISO-100 4 IS0-63 2-1/2 4.13 4.00
4CR-ISO-100-80-OF ISO-100 4 IS0-80 3 4.13 4.00
4CR-ISO-160-63-OF IS0-160 6 ISO-63 2-1/2 5.38 5.00
4CR-ISO-160-80-OF ISO-160 6 ISO-80 3 5.38 5.00
4CR-ISO-160-100-OF ISO-160 6 ISO-100 4 5.38 5.13
4CR-ISO-200-160-OF ISO-200 8 ISO-160 6 7.38 6.38
 

ISO 5-Way Cross

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE
OD
A
5C-ISO-63-OF 21/2 3.25
5C-ISO-80-OF 3 3.50
5C-ISO-100-OF 4 4.13
5C-ISO-160-OF 6 5.38
5C-ISO-200-OF 8 7.38
5C-ISO-250-OF 10 9.88

ISO 6-Way Cross

General: Optional fastener or nonrotatable flanges with clearance bolt holes
Nominal OD sizes: ISO-63 to ISO-500
Tube sizes: 2-1/2 to 20 inches
Materials
   Flange: 304 or 316L stainless steel 
   O-rings: Viton, Buna
   Bolts: 18-8 stainless steel
Vacuum range: 
   Elastomer seal: >= 1 x 10-8 Torr - High vacuum
   EVAC metal seal: >= 1 x 10-11 Torr - UHV
Temperature range: 
   Viton: -20°C to 200°C 
   Buna: -30°C to 110°C
   EVAC metal seal: -270°C to 150°C 

Other Product Images

Additional Information

MODEL NUMBER TUBE
OD
A
6C-ISO-63-OF 2-1/2 3.25
6C-ISO-80-OF 3 3.50
6C-ISO-100-OF 4 4.13
6C-ISO-160-OF 6 5.38
6C-ISO-200-OF 8 7.38
6C-ISO-250-OF 10 9.88