Gauges

Vacuum Gauges

EBARA Technologies, Inc. offers a wide range of compact vacuum gauges sure to meet all of your measurement needs, including:

  • Pirani
  • Pirani/Capacitance
  • Pirani/Ionization
  • Pirani/Capacitance/Ionization covering pressures from Atmosphere to Ultra-High Vacuum.

We also offer a range of Power Supply Display Units that can control all the gauges, or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. Gauges are available with either KF or CF flanges and with or without process control setpoint outputs.

EBARA Technologies, Inc.'s vacuum pump gauges can be used in a wide variety of applications including Loadlocks, PVD Systems, Analytical Systems and a wide variety of others. Learn more about the product specs below or contact us for more information.

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Model EGP

Model EGP

EBARA Technologies, Inc. Pirani gauges offer wide measurement range of atmosphere to medium vacuum (5 e-4 Torr) in a compact package. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints.

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Model EGPC

Model EGPC

EBARA Technologies, Inc. Pirani/Capacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. Pirani/Capacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks. 

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Model EGPI

Model EGPI

EBARA Technologies, Inc. Pirani/Ionization gauges combine the wide measurement range of a Pirani gauge with the high vacuum measurement range of a hot cathode ionization gauge. These gauges are usable from Atmospheric pressure all the way to ultra-high vacuum (5 e-10 Torr). The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Piran/Ionization gauges are available with either KF or CF flanges.

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Model EGT

Model EGT

EBARA Technologies, Inc. Triple gauges are available with either KF or CF flanges. EBARA Technologies, Inc. Triple gauges would typically be used in high vacuum applications that require accuracy at atmosphere such as a high vacuum loadlock.

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Model EGC

Model EGC

Your complete solution for process measurement and control. Compatible to all active gauges, the Model EGC controllers can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status. 

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