Model EGP
Pirani Gauge - Model EGP

Pirani Gauge - Model EGP

EBARA Technologies, Inc. Pirani gauges offer wide measurement range of atmosphere to medium vacuum (5 e-4 Torr) in a compact package. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints.

Features & Benefits

  • Available with Tungsten or Nickel filament or with a fully ceramic coated sensor unit for highly corrosive applications
  • Easy to exchange plug & play senor element with on-board calibration data - guarantees high reproducibility and low cost of ownership
  • Eligible output signal and various plug versions for easy integration
  • Mounts in any orientation
  • Diagnostic port on all versions
  • Optional display, setpoints and digital interfaces

Applications

  • Load Locks
  • PVD Systems
  • Analytical Systems
  • Safety Circuits in Vacuum Systems
  • Fore Vacuum Pressure Measurement
  • Industrial Coating
  • High Energy Physics
  • Semiconductor Processing Tools