Model EGPC
Pirani/Capacitance Gauge - Model EGPC

Pirani/Capacitance Gauge - Model EGPC

EBARA Technologies, Inc. Pirani/Capacitance gauges combine the wide measurement range of a Pirani gauge with the gas independent accuracy at atmosphere of a capacitance gauge. The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints. Pirani/Capacitance gauges typically would be used in applications where high accuracy at atmosphere is required such as Loadlocks. 

Features & Benefits

  • Gas-type independent above 10 mbar - allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere - for reliable atmospheric pressure detection
  • Fast atmospheric detection - eliminates waiting time and shortens process cycle
  • Mount in any orientation
  • Available with Tungsten or Nickel filament or with a fully ceramic coated sensor unit for highly corrosive applications
  • Easy to exchange plug & play sensor element with on-board calibration data - guarantees high reproducibility and low cost of ownership
  • Eligible output signal for easy integration
  • Diagnostic port
  • Optional atmospheric switch, display and digital interfaces 

Applications

  • Load lock control
  • Fore vacuum pressure measurement
  • Safet circuits in vacuum systems
  • General vacuum measurement and control in the medium and rough vacuum range 

Specifications

TYPE UNIT EGPC550
Tungsten
EGPC552
Nickel
EGPC554
Ceramic Coated
Measurement range mbar (Torr) 5 x 10-5 ...1500 (3.8x10-5 ...125)
Accuracy 5x10-4...1x10-3 mbar (N2) % of reading
1x10-3...100 mbar(N2) % of reading
100...950 mbar % of reading
950...1050 mbar % of reading
±50
±15
±5
±2.5
Repeatability 1x10-3...1100 mbar(N2) % of reading ±2
Supply voltage
Power consumption
  without Fieldbus
  DeviceNet
  Profibus
V / A DC

W
W
W
±15...30

≤2.5
≤3
≤3
Setpoint relay
  Range (N2)
  Relay contact
  Hysteresis
  Contact rating
    Solid state relays
    Mechanical relays
  Switching time

mbar

% of threshold

V / A DC
V / A DC
ms
2
5x10-5...1500
n.o., potential free
10

≤30 / ≤0.3
≤30 / ≤1
≤30
Interface (digital)   RS232C
Cable length
  RS232C operation
m (ft) ≤100 (≤330)
≤30 (≤100)
Materials exposed to vacuum   W, Ni, NiFe, Al2O3, SnAg, stainless steel, glass Ni, NiFe, Al2O3, SnAg, stainless steel, glass Al2O3,stainless steel