Model EGPI
Pirani/Ionization Gauge - Model EGPI

Pirani/Ionization Gauge - Model EGPI

EBARA Technologies, Inc. Pirani/Ionization gauges combine the wide measurement range of a Pirani gauge with the high vacuum measurement range of a hot cathode ionization gauge. These gauges are usable from Atmospheric pressure all the way to ultra-high vacuum (5 e-10 Torr). The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Piran/Ionization gauges are available with either KF or CF flanges.

Features & Benefits

  • Extremely wide measurement range from 5 x 10-10 mbar to atmosphere (3.8 x 10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 to 10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions 

Applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the fine and rough vacuum range