Bakeable All Metal valves

Bakeable All Metal Valves

Ebara's bakeable all-metal seal angle valves are intended for use in UHV or cryogenic applications where temperature extremes prelude the use of our elastomer seal valves. Approved for use in beamline facilities, these valves have a temperature operating range from-250°C to 400°C.

Specifications

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Manual Right Angle

Port ODs: 3/4 and 1-1/2 inch
Finish: Electropolished 
Assembly: Clean room 

Materials: 
   Pulled port body: 304 stainless steel
   Bellows: Formed 321 stainless steel 
   Poppet seal: OFHC Copper

Actuation: Manual using self-lubricating bronze nuts with ACME threads 
Maximum bakeout temperature: 
   Open: 400°C
   Closed: 300°C
Vacuum rated: >= 1 x 10-10 Torr - UHV
Helium leak rate: 10-10 std. cc./sec. or less
Options: Heater jackets and controllers

Additional Information

MODEL
NUMBER
PORT
OD
FLANGE
TYPE
CONDUCTANCE (L/SEC.)
MOLECULAR
CONDUCTANCE (L/SEC.)
VISCOUS
A (OPEN)
B
C
AMV-0752-CF 3/4 Rotatable 1.33 CF 3 56 1.50 5.40 1.50
AMV-1502-CF 11/2 Rotatable 2.75 CF 10 356 2.45 6.87 1.50

Bakeable Spares & Replacement Parts