Vacuum Pump Repair & Remanufacturing

EBARA has full vacuum pump repair and remanufacturing capabilities for all types of pumps including EBARA and non-EBARA dry, wet, turbomolecular vacuum pumps. We remanufacture the products to the OEM specs. Ebara Technologies, Inc. is an authorized Osaka Vacuum USA repair provider.

EBARA'S vacuum pump replacement options

  • Repair & Return
  • Advanced Exchange
  • Trade in & Upgrade

EBARA'S Vacuum Pump Remanufacturing Process

EBARA's Technical Assistance hot line is available at 800-535-5376. This hotline is staffed 24/7 to better assist you with general information, technical support, or acquiring a return authorization number (RMA) for pump services.

Our Pump Remanufacturing Process

  • Thorough decontamination and cleaning process
  • Replace gears, bearing and consumable parts
  • Module and System assembly
  • Subjected to hardware, software or procedural engineering revisions, if applicable
  • Subjected to Leak Check and Performance Test under various vacuum pressure regimes
  • Remanufactured pumps leave with a data package containing leak check, pump performance, and throughput curve results
  • Documented ISO 9001 monitored remanufacturing process
  • Completed pump with EBARA warranty capable of meeting new unit performance and specifications