Vacuum Pump Repair Services for Non-EBARA Products

EBARA's award-winning team services all vacuum pump and abatement systems – even those not made by EBARA. Our vacuum pump and repair services include servicing for:

  • Vacuum Pumps
  • Point-of-Use Abatement Cabinets
  • Chillers
  • Exhaust Line Heater and Controls
  • RF Power Supplies
  • Mass Flow Controllers
  • Specialty Process Kit Parts Cleaning

For over 20 years EBARA has provided rebuild, repair and return services for our competitors' dry, wet, turbo and cryo pumps. EBARA's Field Service Team will perform the exchanges, pack & ship, and manage the logistics associated with ensuring success. We will develop and perform all required preventive maintenance for non-EBARA products at the same manor we do with our own products, becoming the first level of support for all planned and unplanned maintenance.

In addition, EBARA's remanufacturing services benefit from a solid foundation of vacuum pump manufacturing excellence combined with field-proven technologies via our global services network (BKMs).

To schedule an appointment for field repairs, please call 800-535-5376.