Ebara Corporation
Precession Machinery Company
Components Division
The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. Components Division: Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement, Exhaust Heaters & Traps, Vacuum Hardware, Related services
Systems Division
The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm. Systems Division: Chemical Mechanical Polishing (CMP), Wafer Plating Systems, Bevel and Backside Clean Treatment Systems
Product Spotlight
Welcome to the Future of Thermal With Ebara’s New vsn™ Control System
The VSN™ (Vision) heater control system supplies a complete network of temperature control by providing each system an operator interface panel with an PID VSN™ Module. Each heater control has been newly designed to make monitoring and controlling all of your thermal solutions simple and effective.
Featured Products
Upcoming Events
FOA (Fab Owners Alliance) Q1 Collaborative Forum
Mar 23 - Mar 25 2021
Virtual
Latest news & Information
Explore the latest news and developments and stay up to date with what is happening at Ebara Technologies.
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51 Main Avenue, Sacramento, CA 95838
