EBARA presently offers two 300mm models (FREX300S2 and FREX300X3SC) as well as a newly re-designed 200mm CMP system (FREX200M).  These systems incorporate the latest technologies into our dry in/dry out integrated clean CMP platforms. Whether this entails planarizing exoitic new materials or providing proven solutions for today's Copper, Oxide, Tungsten, or STI challenges across an array of technology nodes and devices types, EBARA has a CMP system with industry leading technology options to meet your requirements.