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EBARA Corporation

Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

Dry Vacuum Pumps
Turbomolecular Pumps
Point-of-Use Abatement
Exhaust Heaters & Traps
Vacuum Hardware
Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

Chemical Mechanical Polishing (CMP)
Wafer Plating Systems
Bevel and Backside Clean Treatment Systems

EBARA Technologies Inc. Enhances Service Offerings with Eco3d

Ebara Technologies, Inc. now offers 3D laser scanning via our new partnership with Eco3d. Laser scanning provides highly accurate as-built information of all areas within your facility including the clean space, sub-RMF, chase, and sub-fab areas.

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Featured Products

Dry Pumps

Turbomolecular Pumps

Point-of-Use Abatement

Thermal Solutions

Chemical Mechanical
Polishing Systems

Upcoming Events

Nov25

MRS Fall
Boston, MA
Nov 25 - Nov 30, 2018

SVC Tech Con 2019
Long Beach, CA
Apr 27 - May 2, 2019

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