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EBARA Corporation

Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

Dry Vacuum Pumps
Turbomolecular Pumps
Point-of-Use Abatement
Exhaust Heaters & Traps
Vacuum Hardware
Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

Chemical Mechanical Polishing (CMP)
Wafer Plating Systems
Bevel and Backside Clean Treatment Systems

WELCOME TO THE FUTURE OF THERMAL WITH EBARA’s NEW VSN™ CONTROL SYSTEM

The VSN™ (Vision) heater control system supplies a complete network of temperature control by providing each system an operator interface panel with an PID VSN™ Module. Each heater control has been newly designed to make monitoring and controlling all of your thermal solutions simple and effective.