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EBARA Corporation

Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

Dry Vacuum Pumps
Turbomolecular Pumps
Point-of-Use Abatement
Exhaust Heaters & Traps
Vacuum Hardware
Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

Chemical Mechanical Polishing (CMP)
Wafer Plating Systems
Bevel and Backside Clean Treatment Systems

EXPANDED PRODUCT PORTFOLIO: AUXILIARY HARDWARE

EBARA offers complete vacuum hardware installation kits compatible with all of your vacuum pumps, with standard sizes ranging from NW25 thru to NW160. Other sizes and custom kits are available which can be tailored to meet your specific needs and requirements.

With on-hand inventory and short lead-times, as well as unified part numbers for each kit, ordering from Ebara Technologies is easy and convenient.