EBARA Corporation

 Precision Machinery Company


Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services


Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems

EBARA Technologies Inc. Enhances Service Offerings with Eco3d


Ebara Technologies, Inc. now offers 3D laser scanning via our new partnership with Eco3d. Laser scanning provides highly accurate as-built information of all areas within your facility including the clean space, sub-RMF, chase, and sub-fab areas. 

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Featured Products

Upcoming Events

National AVS

National AVS
Long Beach, CA
Oct 21 - Oct 26, 2018

MRS Fall
Boston, MA
Nov 25 - Nov 30, 2018

SVC Tech Con 2019
Long Beach, CA
Apr 27 - May 2, 2019

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