EBARA Corporation

 Precision Machinery Company

 

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services

 

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems

WELCOME TO THE FUTURE OF THERMAL WITH EBARA’s NEW VSN™ CONTROL SYSTEM

 

The VSN™ (Vision) heater control system supplies a complete network of temperature control by providing each system an operator interface panel with an PID VSN™ Module. Each heater control has been newly designed to make monitoring and controlling all of your thermal solutions simple and effective.

 

CONTACT US TO LEARN MORE

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Upcoming Events

Apr12
SESHA Symposium 2021

SESHA Symposium 2021
Hybrid Event
Apr 12 - Apr 16, 2021

SVC TechCon
Gaylord Opryland Resort & Convention Center, Nashv
May 1 - May 6, 2021

64th Annual SVC Technical Conference

UGIM 2020 Symposium
RESCHEDULED
Jun 14 - Jun 17, 2021

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