EMT 7 Series MAGLEV TURBO PUMP SPOTLIGHT
Ebara Technologies, Inc. releases a new line of magnetically levitated (MagLev) turbo pumps, offering a full range of pumping speeds from 340 l/s to 1300 l/s.
This series provides optimal high vacuum performance to cover many applications including: Industrial Coatings, Glass/Thin Film Coaters, Semiconductor (ETCH, HDPCVD, PVD), Solar/FPD Manufacturing, Space Simulation Chambers, Particle Accelerators and other high vacuum research processes.