EBARA Corporation

 Precision Machinery Company

 

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services

 

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems

EMT 7 Series MAGLEV TURBO PUMP SPOTLIGHT

Ebara Technologies, Inc. releases a new line of magnetically levitated (MagLev) turbo pumps, offering a full range of pumping speeds from 340 l/s to 1300 l/s.

This series provides optimal high vacuum performance to cover many applications including: Industrial Coatings, Glass/Thin Film Coaters, Semiconductor (ETCH, HDPCVD, PVD), Solar/FPD Manufacturing, Space Simulation Chambers, Particle Accelerators and other high vacuum research processes.

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