Ebara Corporation
Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. Components Division: Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement, Exhaust Heaters & Traps, Vacuum Hardware, Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm. Systems Division: Chemical Mechanical Polishing (CMP), Wafer Plating Systems, Bevel and Backside Clean Treatment Systems

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Leading edge Semiconductor Manufacturing Equipment, Dry Vacuum Pumps, Thermal Solutions and Point of Use Abatement

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Online store for our variety Ebara products and vacuum hardware

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Wide-range of service programs for Equipment and vacuum pump maintenance that can be customized to meet your operational requirements

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EBARA Thermal Solutions

Temperature Control

The VSN® Temperature Control System supplies a complete network of temperature control by providing an Operator Interface Panel and PID VSN® Modules to each heater. 

The VSN® (Vision) heater control system is designed to make monitoring and controlling all of your thermal solutions simple.  With a multi-color, high visibility LED “eye” built into each VSN® Module, and red LED display, you can take one look at your heaters and know the current status.   

For applications where additional control is needed, The Operator Interface includes Ethernet and Wi-Fi capabilities which allow for Modbus communications for remote access and even email alerts for current heater status.   

The VSN® system is ETL approved to UL and CSA standards, in addition to being CE marked.  

See your future in Thermal Solutions with EBARA Vision (VSN®) 

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