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EBARA Corporation

Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

Dry Vacuum Pumps
Turbomolecular Pumps
Point-of-Use Abatement
Exhaust Heaters & Traps
Vacuum Hardware
Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

Chemical Mechanical Polishing (CMP)
Wafer Plating Systems
Bevel and Backside Clean Treatment Systems

EBARA TECHNOLOGIES INC. PROVIDES COMPLETE VACUUM SOLUTION FOR MANUFACTURERS

EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions.