Ebara Corporation
Precession Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. Components Division: Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement, Exhaust Heaters & Traps, Vacuum Hardware, Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm. Systems Division: Chemical Mechanical Polishing (CMP), Wafer Plating Systems, Bevel and Backside Clean Treatment Systems

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Leading edge Semiconductor Manufacturing Equipment, Dry Vacuum Pumps, Thermal Solutions and Point of Use Abatement

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Online store for our variety Ebara products and vacuum hardware

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Wide-range of service programs for Equipment and vacuum pump maintenance that can be customized to meet your operational requirements

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Thank you for your interest in our products and services. Please feel free to connect with us via email or phone

Product Spotlight

Welcome to the Future of Thermal With Ebara’s New vsn™ Control System

The VSN™ (Vision) heater control system supplies a complete network of temperature control by providing each system an operator interface panel with an PID VSN™ Module. Each heater control has been newly designed to make monitoring and controlling all of your thermal solutions simple and effective.

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Upcoming Events

Upcoming Events

FOA (Fab Owners Alliance) Q1 Collaborative Forum

Mar 23 - Mar 25 2021
Virtual

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Latest news & Information

Latest news & Information

Explore the latest news and developments and stay up to date with what is happening at Ebara Technologies.

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