Ebara Corporation
Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. Components Division: Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement, Exhaust Heaters & Traps, Vacuum Hardware, Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm. Systems Division: Chemical Mechanical Polishing (CMP), Wafer Plating Systems, Bevel and Backside Clean Treatment Systems


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Leading edge Semiconductor Manufacturing Equipment, Dry Vacuum Pumps, Thermal Solutions and Point of Use Abatement


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Online store for our variety Ebara products and vacuum hardware


Get Service

Wide-range of service programs for Equipment and vacuum pump maintenance that can be customized to meet your operational requirements


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Thank you for your interest in our products and services. Please feel free to connect with us via email or phone

Product Spotlight

Protect your valuable vacuum equipment with Ebara’s Vacuum Safety Valve

Ebara’s Vacuum Safety Valve protects a vacuum system upon power failure by isolating the key system and venting the mechanical pump. When power returns, the Vacuum Safety Valve vents the mechanical pump to atmospheric pressure for easy restart. Since the valve operates with atmospheric pressure and triggers upon loss of power, no external pressurized gas source is required. Ebara offers customized Safety Valve kits in KF25/40/50 flange sizes, and is available for all Ebara EV-A series pump models (EV-A03/06/10) in 120VAC and 240VAC variants.

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Upcoming Events

Upcoming Events

SEMICON West 2021

Dec 07 - Dec 09 2021
Hybrid Event

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Latest news & Information

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