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EBARA Corporation

Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

Dry Vacuum Pumps
Turbomolecular Pumps
Point-of-Use Abatement
Exhaust Heaters & Traps
Vacuum Hardware
Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

Chemical Mechanical Polishing (CMP)
Wafer Plating Systems
Bevel and Backside Clean Treatment Systems

Join the EBARA Technologies Inc. and the American Red Cross to help our community impacted by wildfires.

Your support enables the Red Cross to prepare for, respond to and help people recover from these disasters.

Your gift will not only help with immediate needs like food and shelter, it will also put people on the road to recovery.

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Featured Products

Dry Pumps

Turbomolecular Pumps

Point-of-Use Abatement

Thermal Solutions

Chemical Mechanical
Polishing Systems

Upcoming Events

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Q4 SEMI FOA 2020
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Sep 30 - Oct 1, 2020

National AVS 2020
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Oct 25 - Oct 30, 2020

MRS Fall 2020
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Nov 29 - Dec 4, 2020

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