EBARA Corporation

 Precision Machinery Company


Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services


Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems

EBARA Technologies Inc. Provides Chemical Mechanical Polishing Services


EBARA presently offers two 300mm models (FREX300S2 and FREX300X3SC) as well as a newly re-designed 200mm CMP system (FREX200M).  These systems incorporate the latest technologies into our dry in/dry out integrated clean CMP platforms. Whether this entails planarizing exoitic new materials or providing proven solutions for today's Copper, Oxide, Tungsten, or STI challenges across an array of technology nodes and devices types, EBARA has a CMP system with industry leading technology options to meet your requirements.


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