Ebara Corporation
Precision Machinery Company
Components Division
The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. Components Division: Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement, Exhaust Heaters & Traps, Vacuum Hardware, Related services
Systems Division
The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm. Systems Division: Chemical Mechanical Polishing (CMP), Wafer Plating Systems, Bevel and Backside Clean Treatment Systems
Product Spotlight
Protect your valuable vacuum equipment with Ebara’s Vacuum Safety Valve
Ebara’s Vacuum Safety Valve protects a vacuum system upon power failure by isolating the key system and venting the mechanical pump. When power returns, the Vacuum Safety Valve vents the mechanical pump to atmospheric pressure for easy restart. Since the valve operates with atmospheric pressure and triggers upon loss of power, no external pressurized gas source is required. Ebara offers customized Safety Valve kits in KF25/40/50 flange sizes, and is available for all Ebara EV-A series pump models (EV-A03/06/10) in 120VAC and 240VAC variants.
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