EBARA Corporation

 Precision Machinery Company

 

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services

 

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems

EBARA TECHNOLOGIES INC. PROVIDES COMPLETE VACUUM SOLUTION FOR MANUFACTURERS

EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions.

 

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