Ebara Corporation
Precision Machinery Company

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. Components Division: Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement, Exhaust Heaters & Traps, Vacuum Hardware, Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm. Systems Division: Chemical Mechanical Polishing (CMP), Wafer Plating Systems, Bevel and Backside Clean Treatment Systems


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Leading edge Semiconductor Manufacturing Equipment, Dry Vacuum Pumps, Thermal Solutions and Point of Use Abatement


Shop Products & Hardware

Online store for our variety Ebara products and vacuum hardware


Get Service

Wide-range of service programs for Equipment and vacuum pump maintenance that can be customized to meet your operational requirements


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Thank you for your interest in our products and services. Please feel free to connect with us via email or phone

Product Spotlight

Optimize Valuable Floor Space with Ebara’s Modular Installation System

Ebara’s two-level, modular pump rack system is the perfect solution for areas with space constraints. These flexible designs can accommodate different sizes of pumps and save you valuable floor space. Minimize installation and maintenance time with pre-plumbed utility connections. Manage your pumps safely with seismic hold downs and your gas lines with pre-installed shutoff valves and flow regulators. Move your pumps into place, hook-up, and get your production up and running with ease.

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Upcoming Events

Upcoming Events

SEMICON West 2021

Dec 07 - Dec 09 2021
Hybrid Event

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Latest news & Information

Latest news & Information

Explore the latest news and developments and stay up to date with what is happening at Ebara Technologies.

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