Expanding Medium Duty Applications

Ebara Technologies is pleased to announce the newest released medium duty application pump series, Model EV-X. The Model EV-X achieves a wide range of temperature profiles by a variety thermal control configurations. Furthermore, optional booster and main pump and exhaust pipe heaters can ensure maximum internal surface temperatures required for specific applications.

The Model EV-X contributes to productivity improvements thru high reliability, stable operation for long maintenance cycles that support a variety of applications PE-CVD, HDP CVD, MOCVD, Etch, Strip, Ashing, Implant and EPI applications.

Contact your local territory account manager or visit us online at ebaratech.com to learn more.