About Us

EBARA Technologies Inc. Operates Two Divisions

The Components Division supplies a wide range of products, services and applications assistance to the Semiconductor, R&D, University and Industrial and Chemical process industries.

The Systems Equipment Division is the worldwide leading supplier of Chemical Mechanical Polishing (CMP), Advanced Wafer Plating systems, Bevel and Backside Cleaning Treatment Systems.

EBARA Technologies, Inc.’s Design and Manufacture of Dry Pumps System, in-house servicing of Dry Pumps and Turbomolecular Pumps, and EBARA Corporation’s products sold by EBARA Technologies, are designed, manufactured and refurbished with continued compliance and certification to the requirements of ANSI/ISO/ASQ 9001:2015. Ebara Technologies, Inc. provides an unparalleled local and global network of customer support and technical service centers that ensure the highest standard of reliability, maximum uptime, and lowest cost of ownership for all EBARA products.


  • ASQ – American Society for Quality
  • ANSI – American National Standards Institute
  • AVS – American Vacuum Society
  • FOA – Fab Owners Association
  • SESHA – Semiconductor Environmental Safety & Health Association
  • SEMI – Semiconductor Equipment and Materials International
  • SVC – The Society of Vacuum Coaters

Compliance & Ethics

As a U.S. subsidiary of Ebara Corporation, Japan, Ebara Technologies, Inc. (ETI) is guided by the highest standards of compliance and business ethics. ETI has adopted the Ebara Group’s Code of Conduct, Ethics, Corporate Social Responsibility (CSR) and Purchasing Guidelines policies with supplements to meet the requirements of federal, state and local laws. We are committed to providing excellence in products and services while maintaining our values of honesty, trust and accountability in conducting our business with integrity and adherence to all laws and regulations.

The President and Executive Management declarations below and links to the Ebara Group policies exhibit our pledge to maintain our compliance and ethical standards.

Documents & Links

Declaration of Compliance

Declaration on Anti-corruption

Ethics of the Ebara Group

Ebara Group Code of Conduct

Ebara Group Corporate Social Responsibility

Ebara Purchasing Guidelines

Any questions or concerns may be directed to the Company’s Chief Compliance Office.