Newest Multi-Process Use Dry Vacuum Pump Released
Ebara Technologies introduces its latest dry vacuum pump, the Model EV-X Series. This new series bridges a gap in our energy savings dry vacuum pumps by contributing to productivity enhancements resulting in better process reliability and more stable operations.
The Model EV-X Series has a reduced footprint design with an integrated control panel optimized for internal control of gas temperatures. For example, the Model EV-X200N has a 38% footprint reduction versus previous 20k L/min class pumps. By reducing the cooling water and incorporating heaters, this new series offers a broader capability in medium to harsh application. These enhanced features are Ebara Technologies continuing efforts to reduce energy while improving production uptime.
Wide application coverage, including light-medium-harsh duty processes:
- Oxide/Poly/Metal Etch
- Medium Duty PECVD Solutions
- MOCVD or EPI
- Strip or Ash
“Model EV-X” is our model code.
Contact us to learn about all our energy savings vacuum pumps and how we can help achieve your annual energy saving goals!