Particulate Management Solutions
Ebara’s TND Point-of- Use Combustion Wash abatement technology has multiple countermeasures for handling of particulate matter in harsh duty processes such at LPCVD, EPI and ALD. The technology extends maintenance cycles related to byproduct buildup and meeting environmental concerns of PM2.5 abatement. PM2.5 refers to atmospheric particulate matter (PM) that have a diameter of less than 2.5 micrometers, which is about 3% the diameter of a human hair. Through implementation of both proven and new byproduct handling techniques, the TND series handles current and advanced industry applications utilizing harsh processes, higher loads, and exotic chemistries.
In place of the traditional scrubber tower with spray nozzles, the TND unit utilizes a unique scrubber technology achieve >95% DRE of powder by-products. The unique scrubber section utilizes spray nozzles and enhanced momentum technology that collide the effluent gas and particles including PM2.5. These captured particles and acid gases collect in the water circulation tank and handled in the wastewater.
These technologies are proven in Ebara’s testing facilities to ensure quality and efficiency, and have been proven through a wide installation base.