Ebara Technologies MagLev Bearing Turbo Pump - Model EMT

The EMT Series offers a magnetic bearing turbomolecular pump for many applications. All EBARA MagLev Turbo Pumps feature wide pressure ranges with high gas flow capabilities. EMT series offers both Corrosion Resistant/Temperature-Controlled & Ultra-Low Vibration turbo pumps. The Corrosion Resistant/Temperature-Controlled EMT is the ideal solution for Today’s semiconductor and advanced materials industries using corrosive gases which can corrode and form build up inside a turbomolecular pump. EBARA‘s semiconductor OEM Tool Maglev Upgrade Kits are included in the FALL SALE. All kits meet OEM performance, form factor and are available for all popular turbo brands and semiconductor tool platforms.