EBARA’s Modular Pump System

EBARA Technologies’ Modular Pump System (MPS) is a modern solution for OEMs and Sub-Fabs alike. The MPS offers a flexible design that can accommodate all standard EBARA dry vacuum pump models. The MPS is designed with single-point connections for each utility.

Its vertical pump stacking design maximizes valuable sub-fab floor space, while still offering the ability to easily expand the system if changes are needed. Qualification time can be reduced by up to 40% as the total system is tested together. Contact your EBARA Technologies representative to learn how our Modular Pump Systems can expand your productivity.