Parts Cleaning Services Available at EBARA

MOCVD and EPI processes have the potential to leave heavy residue and contaminates within vacuum traps. To meet industry needs, Ebara Technologies offers trap cleaning with experience in MOCVD and EPI processing. To better serve this need, Ebara partnered with Persys Group and together can provide full-scale precision cleaning services for the Semiconductor industry, expanding the EBARAClean capabilities. Together with EBARA, Persys can offer value-add services based on these main pillars; precision cleaning for new parts, part cleaning and decontamination services, refurbishment, and thermal Coating. Contact your local EBARA Technologies representative to learn how our cleaning services can work for you.