Point-of-Use Abatement Systems

EBARA Technologies Inc. offers a full line of comprehensive Point-of-Use Abatement (POU) systems for the exhaust treatment of effluent gases used in the manufacturing of semiconductor chips, photovoltaic cells and flat panel displays.

EBARA’s POU abatement systems allow you to handle harmful gases safely in order to meet the toughest environmental challenges head-on. Each process poses its own unique challenges, and each company has its own safety policies and local regulations to adhere to.

We provide the optimum effluent gas treatment based on our own engineered products, strategic alliances, license agreements and OEM distributed products. Our POU abatement systems include:

Combustion-wash
Catalytic
Dynamic Oxidation
Wet Scrubbing

All of EBARA’s abatement systems are designed for low cost of ownership, high reliability and strict compliance to safety standards.

Our experienced staff works hard to ensure that your exhaust management objectives are met and exceeded. From safe gas handling to meeting environmental challenges such as reducing greenhouse emissions, EBARA partners with you to offer the optimum POU abatement solution.

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Catalyst / Absorption

EBARA’s FDS Systems (Fluorine Dry Scrubber) are capable of abating most PFC gases > 99.9%.

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Combustion Wash

EBARA Technologies Inc. offers a line of combustion-wash (or burner washer) Point-of-Use (POU) Abatement systems. EBARA’s burner-washers are based on the principle of gas decomposition by combustion. This technology offers the greatest flexibility for exhaust gas abatement for the effluent gases used in both semiconductor and photovoltaic manufacturing.

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Wet Scrubber

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