Combustion Wash

Point-of-Use Abatement Burner Washers

EBARA Technologies Inc. offers a line of combustion-wash (or burner washer) Point-of-Use (POU) Abatement systems. EBARA's burner-washers are based on the principle of gas decomposition by combustion. This technology offers the greatest flexibility for exhaust gas abatement for the effluent gases used in both semiconductor and photovoltaic manufacturing.

EBARA's patented burner technology produces high temperatures that allow high abatement efficiencies for the process gases including perfluorinated gases, PFCs. Learn about the specifications of our models below, or contact us for more information.

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