EBARA is a world-leader in the design and manufacture of “dry” vacuum pumps. EBARA dry vacuum pumps provide a host of product advantages including:
Diversified product lines make EBARA the industry leader in vacuum abatement technology and service. EBARA’s dry vacuum pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. EBARA’s dry pumps are also perfect for many applications in the semiconductor industry, and any application where oil backstreaming is unacceptable. Learn about our models below, or contact us for more information.
The Model EV-A series air-cooled dry vacuum pumps have industry-leading specifications. The non-contact, multi-staged roots are designed for reliable, particle-free vacuum generation. Typical applications for EV-A dry pumps include load locks, analytical instruments and metrology equipment that require the best vacuum performance and optimum uptime.
The Model EV-PA ultra-compact series of air cooled dry pumps. Oil free, energy efficient and with no annual maintenance requirements the pump is the perfect solution for replacing noisy and high maintenance scroll and wet oil pumps. The pump offers a low cost of ownership and higher return on investment (ROI). Starting at just 9kg they’re lightweight perfect for small benchtop or mobile systems. Designed for all light duty applications: load locks, electron microscopes, mass specs and other analytical instruments.
The EST Series covers a wide pumping speed range from 88 to 1765 CFM. EST pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.
The EV-M Dry vacuum pump series is designed for harsh process application featuring unique temperature control and on demand torque operation covering from 2,000 Lit/min up to 80,000 Lit/min pumping speed. The EV-M series is capable of processing harsh and light duty applications. This series is designed to consume much less power than previous pumps. A combination of root rotor arrangement and high torque motors and inverters make the EV-M series more energy efficient and the ideal solution for harsh process applications.
The ESR Series (Energy Saving Roots) are multistage dry vacuum pumps engineered for applications ranging from clean to medium duty processes. The ESR Series covers a wide pumping speed range from 35 to 1,625 CFM with an ultimate pressure as low as 1 mTorr.
The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.