Dry Pumps

Dry Vacuum Pumps

EBARA is a world-leader in the design and manufacture of “dry” vacuum pumps. EBARA dry vacuum pumps provide a host of product advantages including:

  • Increased reliability
  • Reduced clean room particulate load
  • Low noise
  • Low vibration
  • Lower operating costs
  • Lowest cost-of-ownership when compared with other dry vacuum pumps on the market today.

Diversified product lines make EBARA the industry leader in vacuum abatement technology and service. EBARA’s dry vacuum pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. EBARA’s dry pumps are ideal for many applications in the semiconductor industry and any application where oil backstreaming is unacceptable.

Learn about our series below, or contact us directly for more information regarding our diverse product lines and related services.

Air Cooled - Model EV-PA

Air Cooled - Model EV-PA

The Model EV-PA ultra-compact series of air cooled dry pumps. Oil free, energy efficient and with no annual maintenance requirements the pump is the perfect solution for replacing noisy and high maintenance scroll and wet oil pumps. The pump offers a low cost of ownership and higher return on investment (ROI). Starting at just 9kg they’re lightweight perfect for small benchtop or mobile systems. Designed for all light duty applications: load locks, electron microscopes, mass specs and other analytical instruments including OEM integrated versions.

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Air Cooled - Model EV-A

Air Cooled - Model EV-A

The EV-A Series covers a wide range of pumping speeds from 9 CFM to 120 CFM with ultimate pressures as low as 7.5 mTorr or 1 Pascal. EV-A dry (oil free) vacuum pumps are designed with industry-leading technology specifications for a reliable, non-contact, particle-free operation designed for clean to light duty applications.

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Light Duty - Model EV-S

Light Duty - Model EV-S

The EV-S Series covers a wide pumping speed range from 58 CFM exceeding 706 CFM with ultimate pressures as low as 3 mTorr or 0.5 Pascal. EV-S dry (oil free) vacuum pumps are robust, compact, lightweight, energy efficient and designed for clean to light to duty applications.

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Medium Duty - Model ESR

Medium Duty - Model ESR

The ESR Series covers a wide pumping speed range from 45 CFM exceeding 1,625 CFM with ultimate pressures as low as 1 mTorr or 0.13 Pascal. The ESR Series (Energy Saving Roots) are multi-stage dry (oil free) vacuum pumps engineered for applications ranging from clean to medium duty processes.

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Harsh Duty - Model EV-M

Harsh Duty - Model EV-M

The EV-M Series covers a wide pumping speed range from 63 CFM exceeding 2825 CFM with ultimate pressures as low as 3 mTorr or 0.5 Pascal. The EV-M dry (oil free) vacuum pump are designed featuring unique temperature control and on demand torque operation while capable of processing most all harsh and light duty applications.

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Harsh Duty - Model EST

Harsh Duty - Model EST

The EST Series covers a wide pumping speed range from 35 CFM exceeding 1,765 CFM with ultimate pressures as low as 3 mTorr or 0.5 Pascal. EST dry (oil free) vacuum pumps are designed as stand-alone screw pumps constructed of NiResist, a solid cast material known for its superior corrosion resistance, best suited for harsh, powdery and corrosive applications.

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High Capacity and Light Gases - Model ESA

High Capacity and Light Gases - Model ESA

The ESA Series covers a wide pumping speed range from 88 to 1765 CFM. ESA pumps are designed and manufactured to be the lowest cost of ownership pumps on the market today. The main pump is constructed of NiResist, a solid cast material known for its superior corrosion resistance.

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