Harsh Duty - Model EST

With EBARA’s unique two-stage screw design and construction, the main pump is packaged with a lobe style booster pump for increased pumping speed. Specifically engineered for harsh applications generating reactive chemical by-products and manufactured to be the lowest cost of ownership pumps on the market today.

Options include:

• Idle Mode allows the tool to send a remotely controlled signal to save additional energy

 Typical applications for EST dry pumps include ALD, variety of etch, CVD and high load requirement processes that require superior corrosion resistance along with the best vacuum performance and optimum uptime.

Model EST10N

Pumping Speed (60 Hz): 1,000 l/min

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Model EST25N

Pumping Speed (60 Hz): 2,500 l/min

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Model ESR30

Pumping Speed (60 Hz): 3,000 l/min

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Model EST100WN

Pumping Speed (60 Hz): 10,000 l/min

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Model EST200WN

Pumping Speed (60 Hz): 20,000 l/min

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Model EST300WN

Pumping Speed (60 Hz): 30,000 l/min

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Model EST500WN

Pumping Speed (60 Hz): 30,000 l/min

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