Harsh Duty - Model EV-M

With EBARA’s unique heat-resistance technology, root rotor arrangement and high torque motors, the EV-M series becomes the next generation of energy efficient vacuum pumps in our portfolio. The EV-M Series vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.

Options include:

• Idle Mode allows the tool to send a remotely controlled signal to save additional energy

 Typical applications for EV-M dry pumps include high load applications such as Atomic Layer Deposition (ALD), a variety of etch and CVD processes and harsher TEOS processes that require the best vacuum performance and optimum uptime.

Model EV-M20N

Pumping Speed (60 Hz): 1,800 l/min

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Model EV-M102N

Pumping Speed (60 Hz): 10,000 l/min

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Model EV-M202N

Pumping Speed (60 Hz): 20,000 l/min

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Model EV-M302N

Pumping Speed (60 Hz): 30,000 l/min

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Model EV-M502N

Pumping Speed (60 Hz): 50,000 l/min

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Model EV-M802N

Pumping Speed (60 Hz): 80,000 l/min

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