High Capacity and Light Gases - Model ESA

Model ESA is built by Ebara’s robust roots pump technology. Model ESA200W and larger models are best suited for fast pump down requirement on large volume chamber in industries such as LCD, photovoltaic manufacturing equipment. Model ESA 25-D and Model ESA70W dry vacuum pumps have the largest installed base pump on MO-CVD applications. Model ESA dry vacuum pumps also feature intelligent rotation sequence for high gas load and advanced interlock function.