Light Duty - Model EV-S

With EBARA’s unique rotor design, idling function combined with roots type vacuum technology, the EV-S Series achieves world-class energy efficiency with a small footprint helping to reduce running costs. The EV-S Series vacuum pumps includes advanced technologies such as a unique exhaust pumping design which contributes to overall pumping performance around atmospheric pressure with identical pumping performance regardless of frequency (50/60 Hz).

Typical applications for EV-S dry vacuum pumps include load locks, SEM, etch, CVD, PVD, light etch and ashing processes that require the best vacuum performance and optimum uptime.

Model EV-S20P

Pumping Speed (60 Hz): 1,670 l/min

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Model EV-S50P

Pumping Speed (60 Hz): 5,000 l/min

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Model EV-S100P

Pumping Speed (60 Hz): 10,000 l/min

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Model EV-S200P

Pumping Speed (60 Hz): 20,000 l/min

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