With EBARA’s unique rotor design, idling function combined with roots type vacuum technology, the EV-S Series achieves world-class energy efficiency with a small footprint helping to reduce running costs. The EV-S Series vacuum pumps includes advanced technologies such as a unique exhaust pumping design which contributes to overall pumping performance around atmospheric pressure with identical pumping performance regardless of frequency (50/60 Hz).
Typical applications for EV-S dry vacuum pumps include load locks, SEM, etch, CVD, PVD, light etch and ashing processes that require the best vacuum performance and optimum uptime.