With EBARA’s unique rotor design, idling function combined with roots type vacuum technology, the ESR Series achieves world-class energy efficiency with a small footprint helping to reduce running costs. With enhanced corrosion resistance options available, this series supports a broad range of applications from light to medium duty with a high temp version for harsh corrosive process.
The Model ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and intelligent controls for throttle adjustments and idle mode utilizations.
Typical applications for the Model ESR dry pumps include load locks, SEM, etch, CVD, PVD, ashing, ion implant, metal etch (HT option). Full range of processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 1,300~2,000 l/min
Pumping Speed (60 Hz): 4,000~8,500 l/min
Pumping Speed (60 Hz): 4,000~10,000 l/min
Pumping Speed (60 Hz): 10,000~20,000 l/min
Pumping Speed (60 Hz): 30,000 l/min
Pumping Speed (60 Hz): 46,000 l/min