Medium Duty - Model ESR

With EBARA’s unique rotor design, idling function combined with roots type vacuum technology, the ESR Series achieves world-class energy efficiency with a small footprint helping to reduce running costs. With enhanced corrosion resistance options available, this series supports a broad range of applications from light to medium duty with a high temp version for harsh corrosive process.

The Model ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and intelligent controls for throttle adjustments and idle mode utilizations.

Options include:

• NiResist (Nickel alloy) to prevent corrosion
• Idle Mode allows the tool to send a remotely controlled signal to save additional energy

 Typical applications for the Model ESR dry pumps include load locks, SEM, etch, CVD, PVD, ashing, ion implant, metal etch (HT option). Full range of processes that require the best vacuum performance and optimum uptime.

Model ESR20N

Pumping Speed (60 Hz): 1,300~2,000 l/min

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Model ESR80W

Pumping Speed (60 Hz): 4,000~8,500 l/min

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Model ESR100W

Pumping Speed (60 Hz): 4,000~10,000 l/min

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Model ESR200W

Pumping Speed (60 Hz): 10,000~20,000 l/min

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Model ESR300W

Pumping Speed (60 Hz): 30,000 l/min

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Model ESR500W

Pumping Speed (60 Hz): 46,000 l/min

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