With EBARA’s unique rotor design, idling function combined with roots type vacuum technology, the ESR Series achieves world-class energy efficiency with a small footprint helping to reduce running costs. With enhanced corrosion resistance options available, this series supports a broad range of applications from light duty processes to harsher more corrosive processes.
The Model ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and intelligent controls for throttle adjustments and idle mode utilizations.
Options include:
Typical applications for the Model ESR dry pumps include load locks, SEM, etch, CVD, PVD, ashing and ion implant processes that require the best vacuum performance and optimum uptime.