Foreline Traps

We offer a variety of standard and custom foreline traps designed for trapping toxic gasses and particulate created when manufacturing semiconductors and photovoltaic cells. To determine which type of foreline trap is right for your application, please view additional information, or call Ebara at 800-535-5376.

Particulate Traps

Particulate traps remove particles over 10 microns in size at 98% efficiency to prevent contamination of the mechanical pump and oil.

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Water Cooled

Water-cooled traps are used for trapping condensable process gasses and their by-products, thus extending maintenance intervals or even eliminating the need for maintenance.

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Specialty

If you have a specific need or application not met by our standard foreline traps, we can alter any of our traps, or customize a trap to meet your needs – just contact us to get started.

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