LPCVD-TEOS

LPCVD-TEOS Traps

Increase your system's throughput and extend preventative maintenance intervals by tw times or more with Ebara's LPCVD/TEO S multistage foreline traps. The first stage is a stainless steel gauze filter which collects crystalline TEO S before it reaches downstream piping and isolation valves.

The second stage is a 10 micron fiberglass filter which removes silicon dioxide which causes frequent PM's in throttling butterfly valves.

The third and final stage is a reservoir which collects liquid TEOS without restricting foreline conductance. The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. Standard finish is beadblasted. Electropolish is available on request.

No products were found matching your selection.