Particulate Traps

These traps remove particles that might enter the mechanical pump and contaminate the oil. Standard traps include a polyester felt filter that traps particles over 10 microns in size at 98% efficiency. Filters can be cleaned with a vacuum cleaner. They are suitable for process temperatures from ambient to 149°C (300°F). Filters with other micron ratings are available upon request.

Woven, 10 micron fiberglass filters are available as an option. They provide a much longer service life than a polyester filter. Fiberglass filter is required for temperatures greater than 149°C (300°F). Maximum fiberglass filter temperature is 370°C (698°F). Filters with other micron ratings are available upon request.

The high capacity fiberglass filter option provides a reservoir for applications with heavy particle loads that might block the inlet. The high capacity filter option is not available for 8 in bodies.

The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. For proper sealing, apply a light coating of Krytox lube when cleaning or replacing the O-ring. Standard finish is beadblast. Electropolish finish, large body sizes, ultra-high capacity, and custom flange configurations are available.

Medium to High Vacuum Filtration

Ebara’s Medium to High Vacuum Filtration systems are ideal for applications that utilize vacuum furnaces or deposition tools.

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Particulate Trap

Ebara Particulate Traps can be used to protect a variety of vacuum pumps from particulate, liquid, aerosol, and vapor contaminants.

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