All-in-one Systems
Dry Pumps
Air Cooled – Model EV-PA
Air Cooled – Model EV-A
Light Duty – Model EV-S
Medium Duty – Model ESR
Harsh Duty – Model EV-M
Medium Duty – Model EV-X
Harsh Duty – Model EST
High Capacity – Model ESA
Refurbished Dry Pumps
Dry Pump Accessories
Turbomolecular Pumps
Ceramic Bearing – Model EBT
MagLev Bearing – Model EMT
MagLev Bearing – Model MK
MagLev Bearing – Model MK-R
Point-of-Use Abatement
Combustion Wash
Catalyst / Absorption
Wet Scrubber
All-in-one Systems
Chemical Mechanical Planarization Systems
Chemical Mechanical Planarization Systems
Bevel polishing system – Model EAC
Thermal Solutions
Water Delivery Pumps
Model NDC
Model PJ
Ozone
OZC Series
OZW Series
Vacuum Gauges
Foreline Traps
Vacuum Valves
Vacuum Hardware
Service/Support

All-in-one System of Dry Pump & Gas Abatement Systems

EBARA’s Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions.

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All-in-one Systems

Application: High Vacuum
Standard Operation: Dry Pump 1~8 Units

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51 Main Avenue, Sacramento, CA 95838