All-in-one Systems

All-in-one System of Dry Pump & Gas Abatement Systems

EBARA’s Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions.

1 result

All-in-one Systems

Application: High Vacuum
Standard Operation: Dry Pump 1~8 Units

View Product